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1. Bending of a Rectangular Cantilever of an Atomic Force Microscope as a Function of Position along Length

Author

Tatsuya Miyatani, Tatsuya Miyatani and Masamichi Fujihira, Masamichi Fujihira

Abstract

In order to measure quantitatively the surface stress change of a cantilever for an atomic force microscope, we studied the bending of a rectangular cantilever pushed ca.50 nm against a hard surface as a function of the laser spot position on the cantilever and compared the result with the bending caused by the surface stress change.

Published
1997
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