1. Global Model in Low-Pressure Oxygen Discharges
- Author
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Roberson, Geraldo, Roberto, Marisa, Verboncoeu, John, and Minnich, Austin
- Abstract
We use a global model (volume averaged) to study plasma discharges in molecular oxygen gas in the pressure range of 1- 78 mTorr. This model determines positive ions O2+, O+, negative ion O-, and electron densities, ground state O2 and O atoms and metastable O2(a1Dg) and O(1D) densities, and electron temperature as function of gas pressure and input power, for a cylindrical discharge. We apply the model to O2 discharges and the results are compared to experimental data and a more elaborated volume-averaged global model developed at the University of California at Berkeley.
- Published
- 2007