1. Surface-Mountable VZO Film-Based Piezoelectric Sensors Array in Foil for Underwater Fluctuating Pressure Measurements
- Author
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Wei, Gao, Chuqiao, Wang, Jianing, Zhang, Daoyuan, Wang, Guangyao, Pei, Keli, Zhao, Yongyao, Chen, Binghe, Ma, and Jian, Luo
- Abstract
Wall fluctuating pressure in the boundary layer is critical for physical understanding of the surface flow and detection resolution optimization of the underwater vehicle (UV). In this study, a flexible microelectromechanical system (MEMS) vanadium-doped zinc oxide (VZO) film piezoelectric pressure sensor array is developed for underwater applications; 2% VZO film achieves figure of merit of -54.5, far higher than the previous records of the contemporary thin films, indicating excellent receiving sensitivity. The sensors are designed and fabricated using a four-mask VZO-on-SOI process. An array of
$2\times 5$ $\pm ~0.06$ - Published
- 2024
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