1. Measurement and simulation of mechanical and optical properties of sputtered amorphous SiC coatings
- Author
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Favaro, G., Amato, A., Arciprete, F., Bazzan, M., Cesarini, E., De Matteis, F., Dao, T. H., Granata, M., Honrado-Benítez, C., Gutiérrez-Luna, N., Larruquert, J. I., Lorenzin, G., Lumaca, D., Maggioni, G., Magnozzi, M., Placidi, E., Prosposito, P., and Puosi, F.
- Subjects
Physics - Instrumentation and Detectors - Abstract
In this work We report on the extensive characterization of amorphous silicon carbide (a-SiC) coatings prepared by physical deposition methods. We compare the results obtained on two different sputtering systems (a standard RF magnetron sputtering and a ion-beam assisted sputtering) to seize the impact of two different setups on the repeatably of the results. After a thorough characterization of structural, morphological, and compositional characteristics of the prepared samples, we focus on a detailed study of the optical and mechanical losses in those materials. Mechanical losses are further investigated from a microscopic point of view by comparing our experimental results with molecular dynamic simulations of the amorphous SiC structure: first we define a protocol to generate a numerical model of the amorphous film, capturing the main features of the real system; then we simulate its dynamical behaviour upon deformation in order to obtain its mechanical response. Our results are discussed within the perspective application of a-SiC as an optical material for high-precision optical experiments and in particular in gravitational wave interferometry., Comment: 30 pages, 11 figures
- Published
- 2022