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The microstructural parameters like the average domain size, effective domain size at a particular crystallographic direction and microstrain within the domains of titanium and Ti-5%Ta-2%Nb, irradiated with 116 MeV O5+ ion, have been characterized as a function of dose by X-Ray Diffraction Line Profile Analysis using different model based approaches. Dislocation Density and stacking fault probabilities have also been estimated from the analysis. The analysis revealed that there was a significant decrease of the average domain size with dose as compared to the unirradiated sample. The estimated values of dislocation density increased significantly for the irradiated samples and was found to be an order of magnitude more as compared to the unirradiated one. However, the dislocation density saturated with increase in dose. The deformation (stacking) fault probabilities were found to be negligible even with the increase in dose of irradiation.