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Start Over Author "Raghunandan S" Publication Type Trade Publications
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1. Laser-scanning projection lithography for wafer-level packaging.

Author

Klosner, M., Zemel, M., Raghunandan, S., and Jain, Kanti

Subjects
*LITHOGRAPHY, *LASERS, *MICROELECTRONIC packaging, *SEMICONDUCTOR wafers
Abstract

Focuses on laser-scanning projection lithography for wafer-level packaging (WLP). Lithography requirements for WLP; Information on Anvik's HexScan laser-projection imaging system; Challenges for WLP lithographies.

Published
2004

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