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Start Over Descriptor "Reaction-diffusion equations" Publication Type Trade Publications
1 results on '"Reaction-diffusion equations"'

1. Diffusion and resolution for chemically amplified resists.

Author

Mack, Chris A.

Subjects
*DIFFUSION, *OPTICAL resolution, *PHOTORESISTS, *REACTION-diffusion equations, *FOURIER analysis
Abstract

The article provides information on diffusion and resolution for chemically amplified resists. It compares the effects of pure diffusion with reaction-diffusion on the amplitudes of the Fourier coefficients. It describes the effect of diffusion on the latent image frequency components for a dense line, comparing pure diffusion to reaction diffusion.

Published
2006

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