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We demonstrate similarity rules for inductively coupled plasmas with thermohydrodynamic coupling effects using two-dimensional fluid simulations and theoretical analyses of the gas flow and heat transfer equations. The results confirm the validity of conventional similarity laws, e.g., the similarity relation for electron density, which can be violated by the nonlinear gas heating effects from exothermic and endothermic reactions. The nonlinear gas heating can obviously perturb the invariance of spatial distributions of the gas flow velocity, resulting in the electron density decreasing nonproportionally with different scaling factors. Adding an external heat source can mitigate the violation of the gas temperature scaling law, thus maintaining the validity of similarity relations to some extent. In addition, two kinds of scaling relations for excited-state argon atoms are identified with and without the consideration of nonlinear collisions. [ABSTRACT FROM AUTHOR]

We demonstrate similarity-based scaling networks for capacitive radio frequency (RF) plasmas, which extensively correlate discharge characteristics under varied conditions, incorporating the transition from original to similarity states. Based on fully kinetic particle-in-cell simulations, similar RF discharges in argon are demonstrated with three external control parameters (gas pressure, gap distance, and driving frequency) simultaneously tuned. A complete set of scaling pathways regarding fundamental discharge parameters is obtained, from which each plasma state finds its neighboring node with only one control parameter tuned. The results from this study provide a promising strategy for plasma multi-parameter mapping, enabling effective cross-comparisons, prediction, and manipulation of RF discharge plasmas. [ABSTRACT FROM AUTHOR]

Resonance mechanisms have been found to be essential for the generation of high-density rf plasmas at low pressures, in which electrons can be continuously accelerated through multiple interactions with the oscillating rf sheaths. In this work, we report the scale-invariant resonance mechanisms, such as bounce resonance heating and plasma series resonance, in low-pressure capacitive rf plasmas in the presence of an external magnetic field. The generation conditions for the resonance mechanisms are determined via fully kinetic simulations. It is found that the resonance dynamical properties of single-frequency plasmas (e.g., a double-peak electron density vs magnetic field curve) can be exactly replicated at different scales when three combined control parameters, i.e., the reduced gap distance pd (pressure × distance), reduced driving frequency f/p (frequency divided by pressure), and reduced magnetic field B/p (magnetic field divided by pressure), are kept constant. The similarity relations for the electron density and electron power absorption in magnetized rf plasmas are numerically confirmed. Furthermore, the similarity and scale-invariant resonance characteristics are elucidated through the scaling of the Boltzmann equation with collisional terms for weakly ionized rf plasmas with a magnetic field, which is proven to be theoretically exact. [ABSTRACT FROM AUTHOR]