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The industrial use of quantum sensors requires further miniaturization of the experimental peripherals, i.e., the high vacuum chamber, laser technology, and control electronics. A central part of the high vacuum chamber is the maintenance of vacuum conditions. For this purpose, a prototype of a compact, i.e., miniaturized, ultrahigh vacuum pump in the form of a nonevaporable getter (NEG) pump at a wafer level (MEMS), is developed within the scope of this work. With regard to the basic conditions of the functionality of the NEG, a miniaturized heating plate with temperature sensors is analytically and numerically developed, constructed, and characterized in an ultrahigh vacuum test stand. This is followed by the integration of the NEG into the existing system, which, in connection with the characterization of material-specific parameters, enables a first correlation of heat input and pumping power. Thus, performance data of the getter-MEMS under high-vacuum confinement confirm its usability for quantum sensors. In addition, optimization potentials are shown with regard to all partial aspects of the MEMS.

Conventional thermal spraying processes are almost exclusively carried out in an air atmosphere, resulting in the oxidation of the particle surfaces and interfaces within the coating and between the substrate and coating. Furthermore, the initial process of surface activation conventionally takes place in an air atmosphere, preventing an oxide-free interfacial transition. Consequently, the application of spraying materials with high oxygen affinity represents a major challenge. To overcome these issues, the present study utilized silane-doped inert gases to create an environment in which the oxygen concentration was equivalent to the residual oxygen content in an extreme high vacuum. By transferring the corundum blasting and coating process (wire arc spraying) to this environment, materials with a high oxygen affinity can be applied without oxidation occurring. For industrial use, this is an interesting prospect, e.g., for repair coatings, as the homogeneity of the composite is improved by a non-oxidized coating. Using the example of arc-sprayed copper coatings, the microstructure and mechanical properties of the coatings were analysed. The results showed that the oxide-free, wire arc sprayed copper coatings exhibited an improved wetting behaviour resulting in a significant reduction of the coating porosity. Moreover, the improved wetting behaviour and led to an increase in the bonding rate and apparent Young’s modulus. Contrary to expectations, the residual stresses decrease although relaxation mechanisms should be inhibited, and possible reasons for this are discussed in the paper.

In the context of intelligent components in industrial applications in the automotive, energy or construction sector, sensor monitoring is crucial for security issues and to avoid long and costly downtimes. This article discusses component-inherent thin-film sensors for this purpose, which, in contrast to conventional sensor technology, can be applied inseparably onto the component’s surface via sputtering, so that a maximum of information about the component’s condition can be generated, especially regarding deformation. This article examines whether the sensors can continue to generate reliable measurement data even after critical component loads have been applied. This extends their field of use concerning plastic deformation behavior. Therefore, any change in sensor properties is necessary for ongoing elastic strain measurements. These novel fundamentals are established for thin-film constantan strain gauges and platinum temperature sensors on steel substrates. In general, a k-factor decrease and an increase in the temperature coefficient of resistance with increasing plastic deformation could be observed until a sensor failure above 0.5% plastic deformation (constantan) occurred (1.3% for platinum). Knowing these values makes it possible to continue measuring elastic strains after critical load conditions on a machine component in terms of plastic deformation. Additionally, a method of sensor-data fusion for the clear determination of plastic deformation and temperature change is presented.

Small-scale optical components with micron or submicron features have grown in popularity in recent years. High-quality, high-efficient, and cost-effective processing approaches for polymer optics mass production are an urgent need. In this study, ultrasonic vibration will be introduced in embossing. The major advantage is that the required energy can be provided for process times ranging from a few hundred milliseconds to a few seconds, and that the process energy is provided at exactly the required location so that the structures in the surrounding area are not affected. Due to the strong correlation between electrical impedance and the temperature of the material, a novel impedance-based control strategy has been utilized for precisely controlling ultrasonic vibration during the embossing process. The investigation used two types of stamps with grating line widths of 4 µm and 500 nm, respectively. As a result, an embossing time of less than a few seconds was accomplished and a uniform embossed surface with an average fill rate of more than 75% could be achieved.

Mode division multiplexing (MDM) could bring a technological progress in the field of optical telecommunication by increasing the data transmission bandwidth. A key challenge for enabling MDM lies in manufacturing of efficient and cost-effective mode-selective fiber couplers. The fiber grating based mode selective coupling approach is a method that is currently being under research in this context. In this work a novel process for manufacturing of asymmetric evanescent field polished couplers is presented which enables grating assisted mode selective coupling. In addition, we discuss the optical setup developed for characterization of these couplers.

To reduce friction in turbo machinery components, riblets are induced on compressor blades or pump impellers. Here, the grinding process enables a higher productivity in machining of riblet structures compared to knurling, laser or milling operations. Usually, profiled grinding tools are used to create such structures inspired by sharkskin. Unfortunately, conventional grinding tools have to be dressed continuously to keep the desired profile in the circumferential surface. To avoid the time-consuming dressing process and to enable a self-sharpening effect, an innovative multi-layer tool concept is developed. The tool consists of two types of thin polyimide layers. The first type contains abrasives and the second is a support layer without abrasives. These layers are piled alternately in a special manufacturing process and act like a monolithic tool in grinding process. The aim of the investigations presented in this paper is to find an optimal parameter setting to produce riblet structures productively by using the self-sharpening effect. The optimal setting allows a grinding process without any dressing process by using a large part of the grinding tool volume. At first, the manufacturing process is focused to create clearly divided support and abrasive layers of the grinding tool. Furthermore, the investigation shows the relationship between grinding parameters and the setback of the supporting layer in the middle of the tool. This setback is important for the creation of riblet structures in the surface of AISI 420 workpieces.