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This article describes the compact solid-state Marx modulator (SSMM) with a fast rising time and a short pulsewidth based on the modular structure. By stacking of the TO-263-7 packaged silicon carbide mosfets having high voltage and fast switching capabilities, the designed circuit consists of three components, including the Marx capacitor, an on switch for applying pulse to the load, and an off switch to pull down the pulse. The off switch connected in parallel with load is chosen as a mosfet instead of a diode that is used in the conventional Marx generator. Because the off switch provides a discharging path for the stored energy on the parasitic capacitance, it is highly related to the fast falling time. In order to provide complementary driving signal and power for on/off switches, the simple control algorithm with a minimum component count and a reliable drive circuit against the noise are proposed. In addition, the synchronization of all the gate signals and a compact configuration for minimizing the stray inductance are essential to shorten the rising, falling, and pulsewidth. Based on the proposed circuit, the following specifications of the developed SSMM are achieved: the output voltage of 10 kV, the pulsewidth of less than 50 ns, and the rising and falling times of less than 15 ns. [ABSTRACT FROM AUTHOR]