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The template matching method has been widely utilized in the defect detection of wafer surfaces. However, the traditional matching approaches are limited by illumination, noise, and deformation, which cannot meet the requirements of accuracy and robustness. In this paper, a novel multiple targets localization method, named Normalized Cross-correlation Adaptive Variable Step-Size Dynamic Template (NCC-AVSSDT) matching, is proposed to improve the accuracy and efficiency of image localization, which combines the advantages of NCC and AVSSDT. The AVSSDT method is utilized to dynamically adjust the scanning step size based on the NCC matching coefficients. This approach optimizes the scanning process, accelerating convergence toward the optimal matching position. Experimental results verify the accuracy and robustness of the proposed method under different conditions, especially when dealing with rotational variations and variations in noise textures. Therefore, NCC-AVSSDT can be used to perform multiple targets localization of chip image in nearly real-time. Three experiment types were used for comprehensive evaluations, including multiple targets, noise, and rotation angles. Experimental results show that NCC-AVSSDT is much better than the sequential similarity detection algorithm and mean absolute deviation methods in terms of multiple targets (0.667 vs 0.811 s, 0.832 s) and success rate (100% vs 35%, 20%). [ABSTRACT FROM AUTHOR]