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Wide-bandgap semiconductors such as silicon carbide, gallium nitride, and diamond are inherently suitable for high power electronics for example in renewable energy applications and electric vehicles. Despite the high interest, the theoretical limit regarding device performance has not yet been reached for these materials. This is often due to charge trapping in defects at the semiconductor-insulator interface. Here we report a one-to-one correlation between electrically stimulated photon emission and the threshold voltage shift obtained from a fully processed commercial 4H-SiC metal-oxide-semiconductor field-effect power transistor. Based on this observation, we demonstrate that the emission spectrum contains valuable information on the energetic position of the charge transition levels of the responsible interface defects. We etch back the transistor from the reverse side in order to obtain optical access to the interface and record the emitted light. Our method opens up point defect characterization in fully processed transistors after device passivation and processing. This will lead to better understanding and improved processes and techniques, which will ultimately push the performance of these devices closer to the theoretical limit.

Within the last decade, considerable efforts have been devoted to fabricating transistors utilizing 2D semiconductors. Also, small circuits consisting of a few transistors have been demonstrated, including inverters, ring oscillators, and static random access memory cells. However, for industrial applications, both time-zero and time-dependent variability in the performance of the transistors appear critical. While time-zero variability is primarily related to immature processing, time-dependent drifts are dominated by charge trapping at defects located at the channel/insulator interface and in the insulator itself, which can substantially degrade the stability of circuits. At the current state of the art, 2D transistors typically exhibit a few orders of magnitude higher trap densities than silicon devices, which considerably increases their time-dependent variability, resulting in stability and yield issues. Here, the stability of currently available 2D electronics is carefully evaluated using circuit simulations to determine the impact of transistor-related issues on the overall circuit performance. The results suggest that while the performance parameters of transistors based on certain material combinations are already getting close to being competitive with Si technologies, a reduction in variability and defect densities is required. Overall, the criteria for parameter variability serve as guidance for evaluating the future development of 2D technologies.