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The oxidation rate of SiC can be greatly enhanced by pre-amorphization ion-implantation (PAI), and the PAI process has been employed to form the LOCal Oxidation of SiC (LOCOSiC) structure for device isolation in SiC integrated circuits (ICs). This work presents the study on the defect layer below the thermally grown SiO2 and the impact of the defect layer on devices. The deep-level transient spectroscopy (DLTS) analysis reveals that the defect layer consists lots of C vacancies and Si vacancies. The leakage current of the edge-intensive N+/P-junction exhibits stronger temperature dependence than that of the P+/N-junction. This result confirms that C vacancy is an effective lifetime killer in n-type SiC, but not in p-type SiC. Although these defects increase the leakage current of the edge-intensive SiC N+/P-junction by 42 times at 150 °C compared with the junction with conventional chemical vapor deposited (CVD) field oxide (FOX), the leakage current is still much lower than the required OFF-state current of ICs. The defect layer has high resistance, and it is hard to let the SiC surface into inversion state so that the threshold voltage of the field MOSFET is higher than ±24 V. [ABSTRACT FROM AUTHOR]

This work demonstrates a trench isolated lateral double-implanted MOSFET (LDMOS) on Si-face in 4H-silicon carbide (SiC). A device $\vphantom {_{\int _{}}}$ where ${L}_{\textit {ch}} = 0.8\,\,\mu \text{m}$ and ${L}_{d} = 12\,\,\mu \text{m}$ shows an ${R}_{ \mathrm{\scriptscriptstyle ON},\text {sp}}$ of 22.9 $\text{m}\Omega $ cm2 at a ${V}_{\text {GS}}$ of 20 V and a breakdown voltage (BV) of 1100 V, corresponding to a high BV2/ ${R}_{ \mathrm{\scriptscriptstyle ON},\text {sp}}$ of 55.5 MW/cm2. Devices that have different ${L}_{\text {ch}}$ , ${L}_{\text {JFET}}$ , ${L}_{d}$ , and P-top dose values are measured in order to investigate the effects of geometry on the static performance. Operations at 150 °C are measured to evaluate the temperature performance. Gate charge waveforms are also measured in order to include the switching performance in the evaluation. The ${R}_{ \mathrm{\scriptscriptstyle ON}} \times {Q}_{G}$ and ${R}_{ \mathrm{\scriptscriptstyle ON}} \times {Q}_{\text {GD}}$ values are calculated as 17.7 and $9.0~\Omega $ nC, respectively, which are promising for power-integrated circuit applications. [ABSTRACT FROM AUTHOR]