Author: "Yamagata, Yuto" / Publication Year Range: Last 3 years - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Yamagata, Yuto"' showing total 3 results

Start Over Author "Yamagata, Yuto" Publication Year Range Last 3 years

3 results on '"Yamagata, Yuto"'

1. Novel high-k mask absorber for next generation EUV lithography

Author: Nakano, Hideaki, primary, Gorai, Ryohei, additional, Yamagata, Yuto, additional, Miyawaki, Daisuke, additional, and Seki, Kazunori, additional
Published: 2022
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2. Novel high-k mask absorber for next generation EUV lithography

Author: Itani, Toshiro, Naulleau, Patrick P., Gargini, Paolo A., Ronse, Kurt G., Nakano, Hideaki, Gorai, Ryohei, Yamagata, Yuto, Miyawaki, Daisuke, and Seki, Kazunori
Published: 2022
Full Text: View/download PDF

3. Novel high-k mask absorber for next generation EUV lithography.

Author: Nakano, Hideaki, Gorai, Ryohei, Yamagata, Yuto, Miyawaki, Daisuke, and Seki, Kazunori
Published: 2022
Full Text: View/download PDF

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