1. Characterization of multilayer thin film optical filters using RBS.
- Author
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Vlastou, R., Fokitis, E., Kokkoris, M., Kossionides, S., Koubouras, G., and Gro¨tzschel, R.
- Subjects
- *
MULTILAYERED thin films , *OPTICAL films , *BACKSCATTERING - Abstract
The composition and thickness of wide band multilayer optical filters, especially designed for the Fluorescence Detector of the Pierre Auger Project, were measured using the RBS (Rutherford Backscattering Spectroscopy) method. The filters were made of 6 pair thin film layers of ZrO[sub 2]/SiO[sub 2], deposited on UV glass or absorption filters. The depth profile of the ZrO[sub 2] layers have been measured directly, while reliable results for the SiO[sub 2] layers could also be extracted. Relative thickness and density of the individual layers have been deduced for the samples, as prepared by electron beam deposition technique as well as after thermal annealing. [ABSTRACT FROM AUTHOR]
- Published
- 2001