1. Pulsed laser deposition BTS thin films: The role of substrate temperature.
- Author
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Chen, Shengtian, Yu, Shihui, Zhang, Bowen, Zhang, Jieling, Ma, Baogang, Liu, Qing, and Zhang, Weifeng
- Subjects
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PULSED laser deposition , *THIN films , *TEMPERATURE effect , *SUBSTRATES (Materials science) , *BARIUM compounds , *DIELECTRIC properties , *STRAY currents , *CURRENT density (Electromagnetism) - Abstract
BaSn 0.15 Ti 0.85 O 3 (BTS) thin films were deposited on Pt/Ti/SiO 2 /Si(1 0 0) substrate by pulsed laser deposition and the effects of substrate temperature on their structure, dielectric properties and leakage current density were investigated. The results indicate that the substrate temperature has a significant effect on the structural and dielectric properties of the BTS thin films which exhibit a polycrystalline perovskite structure if the substrate temperature ranges within 550–750 °C. The dielectric constant and loss tangent of the BTS thin films deposited at 650 °C are 341 and 0.009 at 1 MHz, respectively, the tunability is 72.1% at a dc bias field of 400 kV/cm, while the largest figure of merit (FOM) is 81.1. The effect of the substrate temperature on the leakage current of the BTS thin films is discussed. [ABSTRACT FROM AUTHOR]
- Published
- 2016
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