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This paper reports the design, fabrication, and characterization of a MEMS capacitive accelerometer with an asymmetrical comb finger arrangement. By optimizing the ratio of the gaps of a rotor finger to its two adjacent stator fingers, the sensitivity of the accelerometer is maximized for the same comb finger area. With the fingers' length, width, and depth at 120 μm, 4 μm, and 45 μm, respectively, the optimized finger gap ratio is 2.5. The area of the proof mass is 750 μm × 560 μm, which leads to a theoretical thermomechanical noise of 9 μg/√Hz. The accelerometer has been fabricated using a modified silicon-on-glass (SOG) process, in which a groove is pre-etched into the glass to hold the metal electrode. This SOG process greatly improves the silicon-to-glass bonding yield. The measurement results show that the resonant frequency of the accelerometer is about 2.05 kHz, the noise floor is 28 μg/√Hz, and the nonlinearity is less than 0.5%. [ABSTRACT FROM AUTHOR]

This study proposes a fusion algorithm based on forward linear prediction (FLP) and particle swarm optimization–back propagation (PSO-BP) to compensate for the temperature drift. Firstly, the accelerometer signal is broken down into several intrinsic mode functions (IMFs) using variational modal decomposition (VMD); then, according to the FE algorithm, the IMF signal is separated into mixed components, temperature drift, and pure noise. After that, the mixed noise is denoised by FLP, and PSO-BP is employed to create a model for temperature adjustment. Finally, the processed mixed noise and the processed IMFs are rebuilt to obtain the enhanced output signal. To confirm that the suggested strategy works, temperature experiments are conducted. After the output signal is processed by the VMD-FE-FLP-PSO-BP algorithm, the acceleration random walk has been improved by 23%, the zero deviation has been enhanced by 24%, and the temperature coefficient has been enhanced by 92%, compared with the original signal. [ABSTRACT FROM AUTHOR]

Herein, we investigate the temperature compensation for a dual-mass MEMS gyroscope. After introducing and simulating the dual-mass MEMS gyroscope's working modes, we propose a hybrid algorithm for temperature compensation relying on improved complete ensemble empirical mode decomposition with adaptive noise (ICEEMDAN), sample entropy, time–frequency peak filtering, non-dominated sorting genetic algorithm-II (NSGA II) and extreme learning machine. Firstly, we use ICEEMDAN to decompose the gyroscope's output signal, and then we use sample entropy to classify the decomposed signals. For noise segments and mixed segments with different levels of noise, we use time–frequency peak filtering with different window lengths to achieve a trade-off between noise removal and signal retention. For the feature segment with temperature drift, we build a compensation model using extreme learning machine. To improve the compensation accuracy, NSGA II is used to optimize extreme learning machine, with the prediction error and the 2-norm of the output-layer connection weight as the optimization objectives. Enormous simulation experiments prove the excellent performance of our proposed scheme, which can achieve trade-offs in signal decomposition, classification, denoising and compensation. The improvement in the compensated gyroscope's output signal is analyzed based on Allen variance; its angle random walk is decreased from 0.531076°/h/√Hz to 6.65894 × 10−3°/h/√Hz and its bias stability is decreased from 32.7364°/h to 0.259247°/h. [ABSTRACT FROM AUTHOR]

MEMS accelerometers are significantly impacted by temperature and noise, leading to a considerable compromise in their accuracy. In response to this challenge, we propose a parallel denoising and temperature compensation fusion algorithm for MEMS accelerometers based on RLMD-SE-TFPF and GRU-attention. Firstly, we utilize robust local mean decomposition (RLMD) to decompose the output signal of the accelerometer into a series of product function (PF) signals and a residual signal. Secondly, we employ sample entropy (SE) to classify the decomposed signals, categorizing them into noise segments, mixed segments, and temperature drift segments. Next, we utilize the time-frequency peak filtering (TFPF) algorithm with varying window lengths to separately denoise the noise and mixed signal segments, enabling subsequent signal reconstruction and training. Considering the strong inertia of the temperature signal, we innovatively introduce the accelerometer's output time series as the model input when training the temperature compensation model. We incorporate gated recurrent unit (GRU) and attention modules, proposing a novel GRU-MLP-attention model (GMAN) architecture. Simulation experiments demonstrate the effectiveness of our proposed fusion algorithm. After processing the accelerometer output signal through the RLMD-SE-TFPF denoising algorithm and the GMAN temperature drift compensation model, the acceleration random walk is reduced by 96.11 % , with values of 0.23032 g/h / Hz for the original accelerometer output signal and 0.00895695 g/h / Hz for the processed signal. [ABSTRACT FROM AUTHOR]

The integration of micro-electro-mechanical system–inertial navigation systems (MEMS-INSs) with other autonomous navigation sensors, such as polarization compasses (PCs) and geomagnetic compasses, has been widely used to improve the navigation accuracy and reliability of vehicles in Internet of Things (IoT) applications. However, a MEMS-INS/PC integrated navigation system suffers from cumulative errors and time-varying measurement noise covariance in unknown, complex occlusion, and dynamic environments. To overcome these problems and improve the integrated navigation system's performance, a dual data- and model-driven MEMS-INS/PC seamless navigation method is proposed. This system uses a nonlinear autoregressive neural network (NARX) based on the Gauss–Newton Bayesian regularization training algorithm to model the relationship between the MEMS-INS outputs composed of the specific force and angular velocity data and the PC heading's angular increment, and to fit the integrated navigation system's dynamic characteristics, thus realizing data-driven operation. In the model-driven part, a nonlinear MEMS-INS/PC loosely coupled navigation model is established, the variational Bayesian method is used to estimate the time-varying measurement noise covariance, and the cubature Kalman filter method is then used to solve the nonlinear problem in the model. The robustness and effectiveness of the proposed method are verified experimentally. The experimental results show that the proposed method can provide high-precision heading information stably in complex, occluded, and dynamic environments. [ABSTRACT FROM AUTHOR]

This document is a summary of a special issue titled "State-of-the-Art Functional Biomaterials in China" from the Journal of Functional Biomaterials. The issue includes 13 research and review articles that focus on solutions to challenges faced by current implantable biomedical devices. The articles cover topics such as strategies to treat implant-associated infections, multifunctional bioactive materials for tissue engineering, and fabrication techniques. The goal of the research is to promote tissue regeneration and improve clinical outcomes. The articles discuss various approaches, including the use of antibacterial agents, drug delivery systems, and surface modification techniques. [Extracted from the article]

This document is an editorial for a special issue of the journal Micromachines on Micro-Electromechanical System (MEMS) inertial devices. It explains that MEMS are miniature systems that combine micro-mechanical sensors, actuators, and microelectronic circuits. MEMS inertial devices, such as accelerometers and gyroscopes, capture physical motion and convert it into electrical signals. The editorial highlights various applications of MEMS inertial devices, including aerospace, underwater exploration, robotics, and healthcare. It also discusses the challenges faced by these devices and presents 11 papers in the special issue that cover different aspects of MEMS inertial devices, including design, manufacturing, optimization, and maintenance. [Extracted from the article]

This study proposes an improved multi-scale permutation entropy complete ensemble empirical mode decomposition with adaptive noise (MPE-CEEMDAN) method based on adaptive Kalman filter (AKF) and grey wolf optimizer-least squares support vector machine (GWO-LSSVM). By establishing a temperature compensation model, the gyro temperature output signal is optimized and reconstructed, and a gyro output signal is obtained with better accuracy. Firstly, MPE-CEEMDAN is used to decompose the FOG output signal into several intrinsic mode functions (IMFs); then, the IMFs signal is divided into mixed noise, temperature drift, and other noise according to different frequencies. Secondly, the AKF method is used to denoise the mixed noise. Thirdly, in order to denoise the temperature drift, the fiber gyroscope temperature compensation model is established based on GWO-LSSVM, and the signal without temperature drift is obtained. Finally, the processed mixed noise, the processed temperature drift, the processed other noise, and the signal-dominated IMFs are reconstructed to acquire the improved output signal. The experimental results show that, by using the improved method, the output of a fiber optic gyroscope (FOG) ranging from −30 °C to 60 °C decreases, and the temperature drift dramatically declines. The factor of quantization noise (Q) reduces from 6.1269 × 10−3 to 1.0132 × 10−4, the factor of bias instability (B) reduces from 1.53 × 10−2 to 1 × 10−3, and the factor of random walk of angular velocity (N) reduces from 7.8034 × 10−4 to 7.2110 × 10−6. The improved algorithm can be adopted to denoise the output signal of the FOG with higher accuracy. [ABSTRACT FROM AUTHOR]

In this paper, a fault identification algorithm combining a signal processing algorithm and machine learning algorithm is proposed, using a four-mass vibration MEMS gyroscope (FMVMG) for signal acquisition work, constructing a gyroscope fault dataset, and performing the model training task based on this dataset. Combining the improved EWT algorithm with SEResNeXt-50 reduces the impact of white noise in the signal on the identification task and significantly improves the accuracy of fault identification. The EWT algorithm is a wavelet analysis algorithm with adaptive wavelet analysis, which can significantly reduce the impact of boundary effects, and has a good effect on decomposition of signal segments with short length, but a reconstruction method is needed to effectively separate the noise signal and effective signal, and so this paper uses multiscale permutation entropy for calculation. For the reason that the neural network has a better ability to characterize high-dimensional signals, the one-dimensional signal is reconstructed into a two-dimensional image signal and the signal features are extracted. Then, the constructed image signals are fed into the SEResNeXt-50 network, and the characterization ability of the model is further improved in the network with the addition of the Squeeze-and-Excitation module. Finally, the proposed model is applied to the FMVMG fault dataset and compared with other models. In terms of recognition accuracy, the proposed method improves about 30.25% over the BP neural network and about 1.85% over ResNeXt-50, proving the effectiveness of the proposed method. [ABSTRACT FROM AUTHOR]

MEMS gyroscopes are one of the core components of inertial navigation systems. The maintenance of high reliability is critical for ensuring the stable operation of the gyroscope. Considering the production cost of gyroscopes and the inconvenience of obtaining a fault dataset, in this study, a self-feedback development framework is proposed, in which a dualmass MEMS gyroscope fault diagnosis platform is designed based on MATLAB/Simulink simulation, data feature extraction, and classification prediction algorithm and real data feedback verification. The platform integrates the dualmass MEMS gyroscope Simulink structure model and the measurement and control system, and reserves various algorithm interfaces for users to independently program, which can effectively identify and classify seven kinds of signals of the gyroscope: normal, bias, blocking, drift, multiplicity, cycle and internal fault. After feature extraction, six algorithms, ELM, SVM, KNN, NB, NN, and DTA, were respectively used for classification prediction. The ELM and SVM algorithms had the best effect, and the accuracy of the test set was up to 92.86%. Finally, the ELM algorithm is used to verify the actual drift fault dataset, and all of them are successfully identified. [ABSTRACT FROM AUTHOR]

This paper presents an improved empirical modal decomposition (EMD) method to eliminate the influence of the external environment, accurately compensate for the temperature drift of MEMS gyroscopes, and improve their accuracy. This new fusion algorithm combines empirical mode decomposition (EMD), a radial basis function neural network (RBF NN), a genetic algorithm (GA), and a Kalman filter (KF). First, the working principle of a newly designed four-mass vibration MEMS gyroscope (FMVMG) structure is given. The specific dimensions of the FMVMG are also given through calculation. Second, finite element analysis is carried out. The simulation results show that the FMVMG has two working modes: a driving mode and a sensing mode. The resonant frequency of the driving mode is 30,740 Hz, and the resonant frequency of the sensing mode is 30,886 Hz. The frequency separation between the two modes is 146 Hz. Moreover, a temperature experiment is performed to record the output value of the FMVMG, and the proposed fusion algorithm is used to analyse and optimise the output value of the FMVMG. The processing results show that the EMD-based RBF NN+GA+KF fusion algorithm can compensate for the temperature drift of the FMVMG effectively. The final result indicates that the random walk is reduced from 99.608°/h/Hz1/2 to 0.967814°/h/Hz1/2, and the bias stability is decreased from 34.66°/h to 3.589°/h. This result shows that the algorithm has strong adaptability to temperature changes, and its performance is significantly better than that of an RBF NN and EMD in compensating for the FMVMG temperature drift and eliminating the effect of temperature changes. [ABSTRACT FROM AUTHOR]

This paper presents a new type of three-axis gyroscope. The gyroscope comprises two independent parts, which are nested to further reduce the structure volume. The capacitive drive was adopted. The motion equation, capacitance design, and spring design of a three-axis gyroscope were introduced, and the corresponding formulas were derived. Furthermore, the X/Y driving frequency of the gyroscope was 5954.8 Hz, the Y-axis detection frequency was 5774.5 Hz, and the X-axis detection frequency was 6030.5 Hz, as determined by the finite element simulation method. The Z-axis driving frequency was 10,728 Hz, and the Z-axis sensing frequency was 10,725 Hz. The MEMS gyroscope's Z-axis driving mode and the sensing mode's frequency were slightly mismatched, so the gyroscope demonstrated a larger bandwidth and higher Z-axis mechanical sensitivity. In addition, the structure also has good Z-axis impact resistance. The transient impact simulation of the gyroscope structure showed that the maximum stress of the sensitive structure under the impact of 10,000 g@5 ms was 300.18 Mpa. The gyroscope was produced by etching silicon wafers in DRIE mode to obtain a high aspect ratio structure, tightly connected to the glass substrate by silicon/glass anode bonding technology. [ABSTRACT FROM AUTHOR]

The micro-electro-mechanical system (MEMS) gyroscope is a micro-mechanical gyroscope with low cost, small volume, and good reliability. The working principle of the MEMS gyroscope, which is achieved through Coriolis, is different from traditional gyroscopes. The MEMS gyroscope has been widely used in the fields of micro-inertia navigation systems, military, automotive, consumer electronics, mobile applications, robots, industrial, medical, and other fields in micro-inertia navigation systems because of its advantages of small volume, good performance, and low price. The material characteristics of the MEMS gyroscope is very significant for its data output, and the temperature determines its accuracy and limits its further application. In order to eliminate the effect of temperature, the MEMS gyroscope needs to be compensated to improve its accuracy. This study proposed an improved variational modal decomposition—extreme learning machine (VMD-ELM) algorithm based on convolutional neural networks—long short-term memory (CNN-LSTM) and particle swarm optimization—support vector machines (PSO-SVM). By establishing a temperature compensation model, the gyro temperature output signal is optimized and reconstructed, and the gyro output signal with better accuracy is obtained. The VMD algorithm separates the gyro output signal and divides the gyro output signal into low-frequency signals, mid-frequency signals, and high-frequency signals according to the different signal frequencies. Once again, the PSO-SVM model is constructed by the mid-frequency temperature signal to find the temperature error. Finally, the signal is reconstructed through the ELM neural network algorithm, and then, the gyro output signal after noise is obtained. Experimental results show that, by using the improved method, the output of the MEMS gyroscope ranging from −40 to 60 °C reduced, and the temperature drift dramatically declined. For example, the factor of quantization noise (Q) reduced from 1.2419 × 10−4 to 1.0533 × 10−6, the factor of bias instability (B) reduced from 0.0087 to 1.8772 × 10−4, and the factor of random walk of angular velocity (N) reduced from 2.0978 × 10−5 to 1.4985 × 10−6. Furthermore, the output of the MEMS gyroscope ranging from 60 to −40 °C reduced. The factor of Q reduced from 2.9808 × 10−4 to 2.4430 × 10−6, the factor of B reduced from 0.0145 to 7.2426 × 10−4, and the factor of N reduced from 4.5072 × 10−5 to 1.0523 × 10−5. The improved algorithm can be adopted to denoise the output signal of the MEMS gyroscope to improve its accuracy. [ABSTRACT FROM AUTHOR]

Periprosthetic infection is one of the trickiest clinical problems, which often leads to disastrous consequences. The emergence of tantalum and its derivatives provides novel ideas and effective methods to solve this problem and has attracted great attention. However, tantalum was reported to have different anti-infective effects in vivo and in vitro, and the inherent antibacterial capability of tantalum is still controversial, which may restrict its development as an antibacterial material to some extent. In this study, the polished tantalum was selected as the experimental object, the implant-related tibia osteomyelitis model was first established to observe whether it has an anti-infective effect in vivo compared to titanium, and the early studies found that the tantalum had a lower infectious state in the implant-related tibia osteomyelitis model in vivo than titanium. However, further in vitro studies found that the polished tantalum was not superior to the titanium against bacterial adhesion and antibacterial efficacy. In addition, we focus on the state of interaction between cells, bacteria and materials to restore the internal environment as realistically as possible. We found that the adhesion of fibroblasts to tantalum was faster and better than that of titanium. Moreover, what is more, interesting is that, in the early period, bacteria were more likely to adhere to cells that had already attached to the surface of tantalum than to the bare surface of it, and over time, the cells eventually fell off the biomaterials and took away more bacteria in tantalum, making it possible for tantalum to reduce the probability of infection in the body through this mechanism. Moreover, these results also explained the phenomenon of the "race for the surface" from a completely different perspective. This study provides a new idea for further exploring the relationship between bacteria and host tissue cells on the implant surface and a meaningful clue for optimizing the preparation of antibacterial implants in the future. [ABSTRACT FROM AUTHOR]

In this paper, the structure and working principle of four-mass vibration MEMS gyroscope (FMVMG) are introduced, and the working modes of FMVMG are simulated and analyzed. On the basis of this, an improved noise reduction method based on interval local mean decomposition (ILMD) and parabolic tracking time-frequency peak filtering (PTTFPF) is proposed. PTTFPF can resample the signal along a parabolic path and select the optimal filtering trajectory, but there is still a contradiction, choosing a short window length may lead to good signal amplitude retention, but the random noise reduction effect is not good, while choosing a long window length may lead to serious amplitude attenuation, but the random noise reduction effect is better. In order to achieve a better balance between effective signal amplitude preservation and random noise reduction, the ILMD method was used to improve PTTFPF. First, the original signal was decomposed into product functions (PFs) by local mean decomposition (LMD) method, and the sample entropy (SE) of each PF was calculated. The PFs are divided into three different components. Then, short window PTTFPF is used for useful PF and long window PTTFPF is used for mixed PF, noise PF is directly removed. Then the final signal is reconstructed. Finally, the denoised useful PF and mixed PF are reconstructed to obtain the final signal. The proposed ILMD-PTTFPF algorithm was verified by temperature experiments. The results show that the denoising performance of the ILMD-PTTFPF algorithm is better than that of traditional wavelet threshold denoising and Kalman filtering. [ABSTRACT FROM AUTHOR]

The uses of implantable medical devices are safer and more common since sterilization methods and techniques were established a century ago; however, device-associated infections (DAIs) are still frequent and becoming a leading complication as the number of medical device implantations keeps increasing. This urges the world to develop instructive prevention and treatment strategies for DAIs, boosting the studies on the design of antibacterial surfaces. Every year, studies associated with DAIs yield thousands of publications, which here are categorized into four groups, i.e., antibacterial surfaces with long-term efficacy, cell-selective capability, tailored responsiveness, and immune-instructive actions. These innovations are promising in advancing the solution to DAIs; whereas most of these are normally quite preliminary "proof of concept" studies lacking exact clinical scopes. To help identify the flaws of our current antibacterial designs, clinical features of DAIs are highlighted. These include unpredictable onset, site-specific incidence, and possibly involving multiple and resistant pathogenic strains. The key point we delivered is antibacterial designs should meet the specific requirements of the primary functions defined by the "intended use" of an implantable medical device. This review intends to help comprehend the complex relationship between the device, pathogens, and the host, and figure out future directions for improving the quality of antibacterial designs and promoting clinical translations. [ABSTRACT FROM AUTHOR]

High-G MEMS accelerometer (HGMA) is a new type of sensor; it has been widely used in high precision measurement and control fields. Inevitably, the accelerometer output signal contains random noise caused by the accelerometer itself, the hardware circuit and other aspects. In order to denoise the HGMA's output signal to improve the measurement accuracy, the improved VMD and TFPF hybrid denoising algorithm is proposed, which combines variational modal decomposition (VMD) and time-frequency peak filtering (TFPF). Firstly, VMD was optimized by the multi-objective particle swarm optimization (MOPSO), then the best decomposition parameters [kbest, abest] could be obtained, in which the permutation entropy (PE) and fuzzy entropy (FE) were selected for MOPSO as fitness functions. Secondly, the accelerometer voltage output signals were decomposed by the improved VMD, then some intrinsic mode functions (IMFs) were achieved. Thirdly, sample entropy (SE) was introduced to classify those IMFs into information-dominated IMFs or noise-dominated IMFs. Then, the short-window TFPF was selected for denoising information-dominated IMFs, while the long-window TFPF was selected for denoising noise-dominated IMFs, which can make denoising more targeted. After reconstruction, we obtained the accelerometer denoising signal. The denoising results of different denoising algorithms in the time and frequency domains were compared, and SNR and RMSE were taken as denoising indicators. The improved VMD and TFPF denoising method has a smaller signal distortion and stronger denoising ability, so it can be adopted to denoise the output signal of the High-G MEMS accelerometer to improve its accuracy. [ABSTRACT FROM AUTHOR]

Action and identification problems are the challenges that visually impaired people often encounter in their lives. The high price of existing commercial intelligent auxiliary equipment has placed enormous economic pressure on most visually impaired people in developing countries. In order to solve this problem, this paper proposes a smart wearable system that performs image recognition. The system adopts the method of cloud and local cooperative processing. The cloud server mainly performs image processing, while the local unit only uploads images and feedback results. Therefore, the processor of the system does not need to use expensive high-performance hardware, and the cost is greatly reduced. Moreover, the algorithm running on the cloud server can also guarantee the speed and accuracy of recognition. In addition, we have changed the traditional video continuous scanning strategy to a mechanism for capturing points of interest, reducing power consumption. The attitude correction mechanism based on error codes of the system can effectively help the visually impaired to cope with the common living scenes, and the multiple priority feedbacks and arbitration mechanism will ensure real-time feedback of the system. The proposed smart wearable device has been tested in the actual scene, which proves to be helpful to the visually impaired people. It helps them find the right people and objects and read text. [ABSTRACT FROM AUTHOR]

Aiming at enhancing the accuracy and reliability of velocity calculation in vision navigation, an improved method is proposed in this paper. The method integrates Mask-R-CNN (Mask Region-based Convolutional Neural Network) and K-Means with the pyramid Lucas Kanade algorithm in order to reduce the harmful effect of moving objects on velocity calculation. Firstly, Mask-R-CNN is used to recognize the objects which have motions relative to the ground and covers them with masks to enhance the similarity between pixels and to reduce the impacts of the noisy moving pixels. Then, the pyramid Lucas Kanade algorithm is used to calculate the optical flow value. Finally, the value is clustered by the K-Means algorithm to abandon the outliers, and vehicle velocity is calculated by the processed optical flow. The prominent advantages of the proposed algorithm are (i) decreasing the bad impacts to velocity calculation, due to the objects which have relative motions; (ii) obtaining the correct optical flow sets and velocity calculation outputs with less fluctuation; and (iii) the applicability enhancement of the optical flow algorithm in complex navigation environment. The proposed algorithm is tested by actual experiments. Results with superior precision and reliability show the feasibility and effectiveness of the proposed method for vehicle velocity calculation in vision navigation system. [ABSTRACT FROM AUTHOR]

In this paper, we present a radial basis function (RBF) and cubature Kalman filter (CKF) based enhanced fusion strategy for vision and inertial integrated attitude measurement for sampling frequency discrepancy and divergence. First, the multi-frequency problem of the integrated system and the reason for attitude divergence are analyzed. Second, the filter equation and attitude differential equation are constructed to calculate attitudes separately in time series when visual and inertial data are available or when there are only inertial data. Third, attitude errors between inertial and vision are sent to the input layer of RBF for training. After this, through the activation function of the hidden layer, the errors are transferred to the output layer for weighting the sums, and the training model is established. To overcome the problem of divergence inherent in a multi-frequency system, the well-trained RBF, which can output the attitude errors, is utilized to compensate the attitudes calculated by pure inertial data. Finally, semi-physical simulation experiments under different scenarios are performed to validate the effectiveness and superiority of the proposed scheme in accurate attitude measurements and enhanced anti-divergence capability. [ABSTRACT FROM AUTHOR]

Animals have certain cognitive competence about the environment so they can correct their navigation errors. Inspired by the excellent navigational behavior of animals, this paper proposes a brain-like navigation scheme to improve the accuracy and intelligence of Micro-Electro-Mechanical System based Inertial Navigation Systems (MEMS-INS). The proposed scheme employs vision to acquire external perception information as an absolute reference to correct the position errors of INS, which is established by analyzing the navigation and error correction mechanism of rat brains. In addition, to improve the place matching speed and precision of the system for visual scene recognition, this paper presents a novel place recognition algorithm that combines image scanline intensity (SI) and grid-based motion statistics (GMS) together which is named the SI-GMS algorithm. The proposed SI-GMS algorithm can effectively reduce the influence of uncertain environment factors on the recognition results, such as pedestrians and vehicles. It solves the problem that the matching result will occasionally go wrong when simply using the scanline intensity (SI) algorithm, or the slow matching speed when simply using grid-based motion statistics (GMS) algorithm. Finally, an outdoor Unmanned Aerial Vehicle (UAV) flight test is carried out. Based on the reference information from the high-precision GPS device, the results illustrate the effectiveness of the scheme in error correction of INS and the algorithm in place recognition. [ABSTRACT FROM AUTHOR]

In this paper, the method for compensating the temperature drift of high-G MEMS accelerometer (HGMA) is proposed, including radial basis function neural network (RBF NN), RBF NN based on genetic algorithm (GA), RBF NN based on GA with Kalman filter (KF), and the RBF NN + GA + KF method compensated by the temperature drift model. First, this paper introduces an HGMA structure working principle, conducts a finite element analysis, and produces the results. The simulation results show that the HGMA working mode is the 1st order mode, and its resonant frequency is 408 kHz. The 2nd order mode resonant frequency is 667 kHz, and the gap with the first mode is 260 kHz, indicating that the coupling movement between the two modes is tiny, so the HGMA has good linearity. Then, a temperature experiment is performed to obtain the output value of HGMA. The output values of HGMA are analyzed and optimized by using the algorithms proposed in this paper. The processing results show that the RBF NN + GA + KF method compensated by the temperature drift model achieves the best denoing consequent. The processing results show that the temperature drift of the HGMA is effectively compensated. The final results show that acceleration random walking improved from 17130 g/h/Hz0.5 to 765.3 g/h/Hz0.5, and bias stability improved from 4720 g/h to 57.27 g/h, respectively. The results show that after using the RBF NN + GA + KF method, combined with the temperature drift model, the temperature drift trend and noise characteristics of HGMA are well optimized. [ABSTRACT FROM AUTHOR]

A novel algorithm based on singular spectrum analysis (SSA) and augmented nonlinear differentiator (AND) for extracting the useful signal from a noisy measurement of fiber optic gyroscope (FOG) is proposed in this paper. As a novel type of tracking differentiator, augmented nonlinear differentiator (AND) has the advantages of dynamical performance and noise-attenuation ability. However, there is a contradiction in AND, i.e., selecting a larger acceleration factor may cause faster convergence but bad random noise reduction, whereas selecting a smaller acceleration factor may lead to signal delay but effective random noise reduction. To overcome the contradiction of AND, multi-scale transformation is introduced. Firstly, the noisy signal is decomposed into components by SSA, and the correlation coefficients between each component and original signal are calculated, then the component with biggest correlation coefficient is reserved and other components are filtered by AND with designed selection criterion of acceleration factor, finally the de-noising result is obtained after reconstruction process. There are mainly two prominent advantages of the proposed SSA-AND algorithm: (i) Compared to traditional tracking differentiators, better de-noising ability can be achieved without signal delay; and (ii) compared to other widely used hybrid de-noising methods based on multi-scale transformation, a parameter determination method is given based on the correlation coefficient of each decomposed component, which improves the reliability of the proposed algorithm. [ABSTRACT FROM AUTHOR]

To eliminate the noise and temperature drift in an Micro-Electro-Mechanical Systems (MEMS) gyroscope's output signal for improving measurement accuracy, a parallel processing model based on Multi-objective particle swarm optimization based on variational modal decomposition-time-frequency peak filter (MOVMD–TFPF) and Beetle antennae search algorithm- Elman neural network (BAS–Elman NN) is established. Firstly, variational mode decomposition (VMD) is optimized by multi-objective particle swarm optimization (MOPSO); then, the best decomposition parameters [kbest,abest] can be obtained. Secondly, the gyroscope output signals are decomposed by VMD optimized by MOPSO (MOVMD); then, the intrinsic mode functions (IMFs) obtained after decomposition are classified into a noise segment, mixed segment, and drift segment by sample entropy (SE). According to the idea of a parallel model, the noise segment can be discarded directly, the mixed segment is denoised by time-frequency peak filtering (TFPF), and the drift segment is compensated at the same time. In the compensation part, the beetle antennae search algorithm (BAS) is adopted to optimize the network parameters of the Elman neural network (Elman NN). Subsequently, the double-input/single-output temperature compensation model based on the BAS-Elman NN is established to compensate the drift segment, and these processed segments are reconstructed to form the final gyroscope output signal. Experimental results demonstrate the superiority of this parallel processing model; the angle random walk of the compensated gyroscope output is decreased from 0.531076 to 5.22502 × 10−3°/h/√Hz, and its bias stability is decreased from 32.7364°/h to 0.140403°/h, respectively. [ABSTRACT FROM AUTHOR]

A hemispherical resonator consists of a hemispherical shell and the surrounding circular electrodes. The asymmetry of a hemispherical shell has influence on the vibrating mode and quality factor. The gap distance from shell to electrode is critical for the capacitance and sensitivity of a hemispherical resonator. To realize a symmetric shell and a small gap, a kind of micro-hemispherical resonator (μHR) structure including sandwich-shaped stacks and eave-shaped electrodes has been developed using a glassblowing process. The blowing process could bring favorable surface roughness and symmetry. The locations of the hemispherical shell and surrounding electrodes can be precisely controlled by the designs of sandwich-shaped stacks and eave-shaped electrodes, making it feasible to realize uniform and small gaps. In addition, electrical insulation between the hemispherical shell and eave-shaped electrodes can be guaranteed owing to eave-shaped structure. The fabrication process and results are demonstrated in detail. Furthermore, an estimation method of shell thickness in a nondestructive manner is proposed, with deviation below 5%. Taking asymmetry, surface roughness, and gap into consideration, these results preliminarily indicate this structure with a hemispherical shell and surrounding eave-shaped electrodes is promising in hemispherical resonator applications. [ABSTRACT FROM AUTHOR]

High-G accelerometers are mainly used for motion measurement in some special fields, such as projectile penetration and aerospace equipment. This paper mainly explores the wavelet threshold denoising and wavelet packet threshold denoising in wavelet analysis, which is more suitable for high-G piezoresistive accelerometers. In this paper, adaptive decomposition and Shannon entropy criterion are used to find the optimal decomposition layer and optimal tree. Both methods use the Stein unbiased likelihood estimation method for soft threshold denoising. Through numerical simulation and Machete hammer test, the wavelet threshold denoising is more suitable for the dynamic calibration of a high-G accelerometer. The wavelet packet threshold denoising is more suitable for the parameter extraction of the oscillation phase. [ABSTRACT FROM AUTHOR]

For the sake of decreasing the effects of noise and temperature error on the measurement accuracy of micro-electro-mechanical system (MEMS) gyroscopes, a denoising and temperature drift compensation parallel model method based on wavelet transform and forward linear prediction (WFLP) and support vector regression based on the cuckoo search algorithm (CS-SVR) is proposed in this paper. First, variational mode decomposition (VMD) is proposed in this paper, which is aimed at dividing the output signal of the gyroscope into intrinsic mode functions (IMFs); then, the IMFs are classified into three features—drift, mixed, and pure noise features—by the sample entropy (SE) value. Second, a wavelet transform and forward linear prediction (WFLP) are combined to remove the noise from the mixed features. Meanwhile, the drift feature is compensated by support vector regression based on the cuckoo search algorithm (CS-SVR). Finally, through reconstruction, the final signal is obtained. Experimental results demonstrate that the VMD-SE-WFLP-CS-SVR method proposed in this paper can decrease noise and compensate the temperature error effectively (angular random walking value is optimized from 1.667°/√h to 0.0667°/√h and the bias stability is reduced from 30°/h to 4°/h). In terms of denoising, the performance of the WFLP algorithm is superior to the wavelet threshold and FLP, as it combines their advantages; furthermore, in terms of temperature compensation, the proposed CS-SVR algorithm uses the cuckoo search algorithm to find the optimal parameters of SVR, improving the accuracy of the model. [ABSTRACT FROM AUTHOR]

To deal with the influence of temperature drift for a Micro-Electro-Mechanical System (MEMS) gyroscope, this paper proposes a new temperature error parallel processing method based on a novel fusion algorithm. Firstly, immune based particle swarm optimization (IPSO) is employed for optimal parameters search for Variational Modal Decomposition (VMD). Then, we can get the optimal decomposition parameters, wherein permutation entropy (PE) is employed as the fitness function of the particles. Then, the improved VMD is performed on the output signal of the gyro to obtain intrinsic mode functions (IMFs). After judging by sample entropy (SE), the IMFs are divided into three categories: noise term, mixed term and feature term, which are processed differently. Filter the mixed term and compensate the feature term at the same time. Finally, reconstruct them and get the result. Compared with other optimization algorithms, IPSO has a stronger global search ability and faster convergence speed. After Back propagation neural network (BP) is enhanced by Adaptive boosting (Adaboost), it becomes a strong learner and a better model, which can approach the real value with higher precision. The experimental result shows that the novel parallel method proposed in this paper can effectively solve the problem of temperature errors. [ABSTRACT FROM AUTHOR]

In this paper, a novel temperature compensation method for a dual-mass MEMS gyroscope is proposed based on drive mode vibration characteristic compensation using a temperature variable resistor. Firstly, the drive and sense modes of the gyroscope re analyzed and investigated, and it is found that the scale factor is proportional to the drive mode amplitude controlling reference voltage. Then, the scale factor temperature compensation method is proposed, and a temperature variable resistor is utilized to compensate the drive amplitude working point and make it change with temperature. In addition, the temperature compensation circuit is designed and simulated. After that, the temperature bias drift is compensated in a modular output. The experimental results show that scale factor and bias variation during the temperature range from −40 °C to 60 °C decrease from 3.680% to 1.577% and 3.880% to 1.913%, respectively. In addition, the bias value improves from 103.395 °/s to 22.478 °/s (optimized 78.26%). The bias stability and angular rate walking parameter are also optimized to 45.97% and 16.08%, respectively, which verify the method proposed in this paper. [ABSTRACT FROM AUTHOR]

This study presents a new microelectromechanical system, a vibration ring gyroscope with a double U-beam (DUVRG), which was designed using a combination of mathematical analysis and the finite element method. First, a ring vibration resonator with eight double U-beam structures was developed, and 24 capacitive electrodes were designed for drive and sense according to the advantageous characteristics of a thin-shell vibrating gyroscope. Then, based on the elastic mechanics and thin-shell theory, a mathematical stiffness model of the double U-beam was established. The maximum mode resonant frequency error calculated by the DUVRG stiffness model, finite element analysis (FEA) and experiments was 0.04%. DUVRG structures were manufactured by an efficient fabrication process using silicon-on-glass (SOG) and deep reactive ion etching (DRIE), and the FEA value and theoretical calculation had differences of 5.33% and 5.36% with the measured resonant frequency value, respectively. Finally, the static and dynamic performance of the fabricated DUVRG was tested, and the bias instability and angular random walk were less than 8.86 (°)/h and 0.776 (°)/√h, respectively. [ABSTRACT FROM AUTHOR]

High-G MEMS accelerometers have been widely used in monitoring natural disasters and other fields. In order to improve the performance of High-G MEMS accelerometers, a denoising method based on the combination of empirical mode decomposition (EMD) and wavelet threshold is proposed. Firstly, EMD decomposition is performed on the output of the main accelerometer to obtain the intrinsic mode function (IMF). Then, the continuous mean square error rule is used to find energy cut-off point, and then the corresponding high frequency IMF component is denoised by wavelet threshold. Finally, the processed high-frequency IMF component is superposed with the low-frequency IMF component, and the reconstructed signal is denoised signal. Experimental results show that this method integrates the advantages of EMD and wavelet threshold and can retain useful signals to the maximum extent. The impact peak and vibration characteristics are 0.003% and 0.135% of the original signal, respectively, and it reduces the noise of the original signal by 96%. [ABSTRACT FROM AUTHOR]

This paper proposes an effective method to calibrate the microelectromechanical systems (MEMS) vibratory gyroscope based on the virtual Coriolis force. This method utilizes a series of voltage signals to simulate the Coriolis force input, and the gyroscope output is monitored to obtain the scale factor characteristics of the gyroscopes. The scale factor and bias parameters of the gyroscope can be calibrated conveniently and efficiently in the sense-mode open loop. The calibration error of the scale factor based on the turntable and the virtual Coriolis force method is only 1.515%, which proves the correction of the method proposed in this paper. Meanwhile, the non-linearity and bias value of the turntable and the virtual Coriolis force method are 742 ppm and 42.04 mV and 3389 ppm and 0.66 mV, respectively. [ABSTRACT FROM AUTHOR]

The cubature Kalman filter (CKF) is widely used in the application of GPS/INS integrated navigation systems. However, its performance may decline in accuracy and even diverge in the presence of process uncertainties. To solve the problem, a new algorithm named improved strong tracking seventh-degree spherical simplex-radial cubature Kalman filter (IST-7thSSRCKF) is proposed in this paper. In the proposed algorithm, the effect of process uncertainty is mitigated by using the improved strong tracking Kalman filter technique, in which the hypothesis testing method is adopted to identify the process uncertainty and the prior state estimate covariance in the CKF is further modified online according to the change in vehicle dynamics. In addition, a new seventh-degree spherical simplex-radial rule is employed to further improve the estimation accuracy of the strong tracking cubature Kalman filter. In this way, the proposed comprehensive algorithm integrates the advantage of 7thSSRCKF’s high accuracy and strong tracking filter’s strong robustness against process uncertainties. The GPS/INS integrated navigation problem with significant dynamic model errors is utilized to validate the performance of proposed IST-7thSSRCKF. Results demonstrate that the improved strong tracking cubature Kalman filter can achieve higher accuracy than the existing CKF and ST-CKF, and is more robust for the GPS/INS integrated navigation system. [ABSTRACT FROM AUTHOR]

An adaptive multi-scale method based on the combination generalized morphological filter (CGMF) is presented for de-noising of the output signal from a MEMS gyroscope. A variational mode decomposition is employed to decompose the original signal into multi-scale modes. After choosing a length selection for the structure element (SE), the adaptive multi-scale CGMF method reduces the noise corresponding to the different modes, after which a reconstruction of the de-noised signal is obtained. From an analysis of the effect of de-noising, the main advantages of the present method are that it: (i) effectively overcomes deficiencies arising from data deviation compared with conventional morphological filters (MFs); (ii) effectively targets the different components of noise and provides efficacy in de-noising, not only primarily eliminating noise but also smoothing the waveform; and (iii) solves the problem of SE-length selection for a MF and produces feasible formulae of indicators such as the power spectral entropy and root mean square error for mode evaluations. Compared with the other current signal processing methods, the method proposed owns a simpler construction with a reasonable complexity, and it can offer better noise suppression effect. Experiments demonstrate the applicability and feasibility of the de-noising algorithm. [ABSTRACT FROM AUTHOR]

Electrostatic driving and capacitive detection is widely used in micro hemispheric shell resonators (HSR). The capacitor gap distance is a dominant factor for the initial capacitance, and affects the driving voltage and sensitivity. In order to decrease the equivalent gap distance, a micro HSR with annular electrodes fabricated by a glassblowing method was developed. Central and annular cavities are defined, and then the inside gas drives glass softening and deformation at 770 °C. While the same force is applied, the deformation of the hemispherical shell is about 200 times that of the annular electrodes, illustrating that the deformation of the electrodes will not affect the measurement accuracy. S-shaped patterns on the annular electrodes and internal-gear-like patterns on the hemispherical shell can improve metal malleability and avoid metal cracking during glass expansion. An arched annular electrode and a hemispheric shell are demonstrated. Compared with HSR with a spherical electrode, the applied voltage could be reduced by 29%, and the capacitance could be increased by 39%, according to theoretical and numerical calculation. The surface roughness of glass after glassblowing was favorable ( R q = 0.296 nm, R a = 0.217 nm). In brief, micro HSR with an annular electrode was fabricated, and its superiority was preliminarily confirmed., Competing Interests: The authors declare no conflict of interest.

Despite its extreme significance, dynamic linearity measurement for high-g accelerometers has not been discussed experimentally in previous research. In this study, we developed a novel method using a dual-warhead Hopkinson bar to measure the dynamic linearity of a high-g acceleration sensor with a laser interference impact experiment. First, we theoretically determined that dynamic linearity is a performance indicator that can be used to assess the quality merits of high-g accelerometers and is the basis of the frequency response. We also found that the dynamic linearity of the dual-warhead Hopkinson bar without an accelerometer is 2.5% experimentally. Further, we verify that dynamic linearity of the accelerometer is 3.88% after calibrating the Hopkinson bar with the accelerometer. The results confirm the reliability and feasibility of measuring dynamic linearity for high-g accelerometers using this method.

The different noise components in a dual-mass micro-electromechanical system (MEMS) gyroscope structure is analyzed in this paper, including mechanical-thermal noise (MTN), electronic-thermal noise (ETN), flicker noise (FN) and Coriolis signal in-phase noise (IPN). The structure equivalent electronic model is established, and an improved white Gaussian noise reduction method for dual-mass MEMS gyroscopes is proposed which is based on sample entropy empirical mode decomposition (SEEMD) and time-frequency peak filtering (TFPF). There is a contradiction in TFPS, i.e., selecting a short window length may lead to good preservation of signal amplitude but bad random noise reduction, whereas selecting a long window length may lead to serious attenuation of the signal amplitude but effective random noise reduction. In order to achieve a good tradeoff between valid signal amplitude preservation and random noise reduction, SEEMD is adopted to improve TFPF. Firstly, the original signal is decomposed into intrinsic mode functions (IMFs) by EMD, and the SE of each IMF is calculated in order to classify the numerous IMFs into three different components; then short window TFPF is employed for low frequency component of IMFs, and long window TFPF is employed for high frequency component of IMFs, and the noise component of IMFs is wiped off directly; at last the final signal is obtained after reconstruction. Rotation experimental and temperature experimental are carried out to verify the proposed SEEMD-TFPF algorithm, the verification and comparison results show that the de-noising performance of SEEMD-TFPF is better than that achievable with the traditional wavelet, Kalman filter and fixed window length TFPF methods.

This paper focuses on an optimal quadrature error correction method for the dual-mass MEMS gyroscope, in order to reduce the long term bias drift. It is known that the coupling stiffness and demodulation error are important elements causing bias drift. The coupling stiffness in dual-mass structures is analyzed. The experiment proves that the left and right masses' quadrature errors are different, and the quadrature correction system should be arranged independently. The process leading to quadrature error is proposed, and the Charge Injecting Correction (CIC), Quadrature Force Correction (QFC) and Coupling Stiffness Correction (CSC) methods are introduced. The correction objects of these three methods are the quadrature error signal, force and the coupling stiffness, respectively. The three methods are investigated through control theory analysis, model simulation and circuit experiments, and the results support the theoretical analysis. The bias stability results based on CIC, QFC and CSC are 48 °/h, 9.9 °/h and 3.7 °/h, respectively, and this value is 38 °/h before quadrature error correction. The CSC method is proved to be the better method for quadrature correction, and it improves the Angle Random Walking (ARW) value, increasing it from 0.66 °/√h to 0.21 °/√h. The CSC system general test results show that it works well across the full temperature range, and the bias stabilities of the six groups' output data are 3.8 °/h, 3.6 °/h, 3.4 °/h, 3.1 °/h, 3.0 °/h and 4.2 °/h, respectively, which proves the system has excellent repeatability.