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MEMS accelerometers are significantly impacted by temperature and noise, leading to a considerable compromise in their accuracy. In response to this challenge, we propose a parallel denoising and temperature compensation fusion algorithm for MEMS accelerometers based on RLMD-SE-TFPF and GRU-attention. Firstly, we utilize robust local mean decomposition (RLMD) to decompose the output signal of the accelerometer into a series of product function (PF) signals and a residual signal. Secondly, we employ sample entropy (SE) to classify the decomposed signals, categorizing them into noise segments, mixed segments, and temperature drift segments. Next, we utilize the time-frequency peak filtering (TFPF) algorithm with varying window lengths to separately denoise the noise and mixed signal segments, enabling subsequent signal reconstruction and training. Considering the strong inertia of the temperature signal, we innovatively introduce the accelerometer's output time series as the model input when training the temperature compensation model. We incorporate gated recurrent unit (GRU) and attention modules, proposing a novel GRU-MLP-attention model (GMAN) architecture. Simulation experiments demonstrate the effectiveness of our proposed fusion algorithm. After processing the accelerometer output signal through the RLMD-SE-TFPF denoising algorithm and the GMAN temperature drift compensation model, the acceleration random walk is reduced by 96.11 % , with values of 0.23032 g/h / Hz for the original accelerometer output signal and 0.00895695 g/h / Hz for the processed signal. [ABSTRACT FROM AUTHOR]

In recent years, High-G MEMS accelerometers have been widely used in aviation, medicine, and other fields. So it is extremely important to improve the accuracy and performance of High-G MEMS accelerometers. For this purpose, we propose a fusion algorithm that combines EMD, wavelet thresholding, and temperature compensation to process measurement data from a High-G MEMS accelerometer. In the fusion algorithm, the original accelerometer signal is first decomposed by EMD to obtain the intrinsic mode function (IMF). Then, sample entropy (SE) is used to divide the IMF components into three segments. The noise segment is directly omitted, wavelet thresholding is performed on the mixing segment, and a GA-BP performs temperature compensation on the drift segment. Finally, signal reconstruction is implemented. Later, a comparative analysis is carried out on the results from four models: EMD, wavelet thresholding, EMD + wavelet thresholding, and EMD + wavelet thresholding + temperature compensation. The experimental data show that the acceleration random walk change from 1712.66 g/h/Hz0.5 to 79.15 g/h/Hz0.5 and the zero-deviation stability change from 49275 g/h to 774.7 g/h. This indicates that the fusion algorithm (EMD + wavelet thresholding + temperature compensation) not only effectively suppresses the noise of high-frequency components but also compensates for temperature drift in the accelerometer. [ABSTRACT FROM AUTHOR]