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• Four hybrid materials (HfO 2 /Al 2 O 3 nanolaminate, HfO 2 /SiO 2 nanolaminate, HfO 2 -Al 2 O 3 mixture, and HfO 2 -SiO 2 mixture coatings) are investigated. • Hybrid materials show suppressed crystallization and reduced surface roughness, enabling tunable bandgaps and optical constants. • Hybrid-material-based mirror coatings are investigated and mixture-based mirror coatings have the highest LIDT. • The damage initiation mechanism of the mirror coating varies around 3 ps for laser pulses ranging from 0.5 to 8 ps.. Four hybrid materials (HfO 2 /Al 2 O 3 nanolaminate, HfO 2 /SiO 2 nanolaminate, HfO 2 –Al 2 O 3 mixture, and HfO 2 –SiO 2 mixture) and four hybrid-material-based mirror coatings are prepared via electron-beam evaporation. The refractive index (n), optical bandgaps, and microstructural properties of the hybrid materials are investigated and compared with those of pure materials. Experimental results show that the hybrid materials suppress crystallization, reduce surface roughness, and provide tunable bandgaps and optical constants. Among the four hybrid materials with similar n values, the HfO 2 –Al 2 O 3 mixture shows the largest bandgap. All the hybrid-material-based mirror coatings exhibit a higher laser-induced damage threshold (LIDT) at 8 picosecond (ps) than the conventional pure-material-based mirror coating. The HfO 2 –Al 2 O 3 mixture-based mirror coating with a relative high LIDT is used for further study of the pulse width dependence of the LIDT, and shows superior LIDT over the conventional mirror coating at 0.5 ps, 1 ps and 3 ps. Typical damage morphological features induced at different pulse widths show that the damage-initiation mechanism of the mirror coating changes around 3 ps. [ABSTRACT FROM AUTHOR]

• HfO 2 –SiO 2 mixture coatings with different proportions were investigated. • Admixing 10% or higher SiO 2 in the mixture coatings suppresses inhomogeneity of HfO 2. • Short-wave pass dichroic laser mirror coatings were prepared using mixture layers. • Using HfO 2 –SiO 2 mixture layers fundamentally solves the half-wave hole effect. • Using different mixture layers gets further optical improvement in the pass band. Hafnia/silica (HfO 2 /SiO 2) short-wavelength pass dichroic laser mirror (DLM) coatings are widely utilized in high-power laser systems. However, the half-wave hole effect resulting from the refractive index inhomogeneity of HfO 2 severely restricts the spectra and potential applications of these coatings. To address this issue, an investigation was conducted on HfO 2 –SiO 2 mixture coatings with different proportions, which were produced by electron beam co-evaporation. Compared to the inhomogeneous growth characteristics observed in pure HfO 2 coatings, the introduction of 10 % or higher SiO 2 admixing in HfO 2 –SiO 2 mixture coatings results in an amorphous structure characterized by excellent refractive index homogeneity and improved surface smoothness. Leveraging this, different DLM coatings with the objective of achieving high transmittance across the 400 to 900 nm range were designed and prepared, while ensuring high reflectance at 1064 nm. The incorporation of HfO 2 –SiO 2 mixture layers instead of pure HfO 2 layers in the mirror coatings led to a fundamental inhibition of the half-wave hole effect throughout the entire broad transmission band, resulting in a substantial improvement in the optical performance of the coatings. Moreover, by incorporating several types of HfO 2 –SiO 2 mixture layers with different proportions in the coating stacks, the transmittance of DLM coatings in the pass band can be further increased, and the transmission fluctuations at different wavelengths can be further compressed. Additionally, compared to traditional DLM coatings with HfO 2 layers, DLM coatings incorporating HfO 2 –SiO 2 mixture layers exhibit lower roughness, higher laser-induced damage threshold (LIDT) at 532 nm, and similar LIDT at 1064 nm. These results indicate a promising strategy for fabricating DLM coatings tailored for high-power laser systems. [ABSTRACT FROM AUTHOR]

Abstract: Y2O3/SiO2 coatings were deposited on fused silica by electron beam evaporation. A continuous wave CO2 laser was used to condition parts of the prepared samples at different scanning speeds in the air. LAMBDA 900 spectrometer was used to investigate the changes of the transmittance and residual reflection spectrum. A Nomarski microscope under dark field was used to examine the changes of the micro defect density. The changes of the surface roughness and the microstructure of the film before and after conditioning were investigated by AFM and X-ray diffraction, respectively. We found that laser-induced damage threshold (LIDT) of the films conditioning at 30mm/s scanning speed was increased by more than a factor of 3 over the thresholds of the as-deposited films. The conditioning effect was correlated with an irradiation-induced decrease of the defect density and absorption of the films. [Copyright &y& Elsevier]

Abstract Laser-induced damage of ultraviolet (UV) coatings poses a great challenge and restricts its application in space. Coatings prepared by ion beam sputtering are dense and possess high laser-induced damage threshold (LIDT), which are absence of structural nodule defects. Subsurface damage defects easily exposed by etching are inevitable under substrate grinding and polishing processes, which are usually ignored in electron-beam evaporation coatings. In our experiments, we find that LIDT of 355-nm high-reflection (HR) coatings sputtered on etched substrates declines dramatically, meanwhile defect density increases. Pits are found on the surface of the substrates and the coatings, and the pits that induce laser damage are very small (submicron-scale). Laser damage morphologies reveal that damage sites are prone to occur around the pits caused by acid etching. Finite element analysis shows consistent results, enhancement of electric field and rise of temperature are obvious, and the most significant part is around the pits, which is prone to induce damage. To conclude, small structural defects are sensitive to laser-induced damage of HR coatings prepared by dual ion beam sputtering (DIBS). This work contributes to finding new ways of improving the LIDT of sputtering coatings. Highlights • The structural defects on substrates are relatively small and shallow, the depth and the diameter of the pits are in the range of ∼50–120 nm and ∼400–600 nm, respectively. • The diameters of the pits on the surface of the coatings (DIBS) are larger than the substrate, which is different from the EBE coatings and indicates different growth process. • The LIDTs of our samples are sharply declined by the presence of the pits, the damage morphologies show thermal ablation. • High electric field and temperature by a FEA method are found at the edge of the pits on the surface of the coatings, which agrees with the experimental result. • The pits strongly enhance the thermal effect, which increases the possibility of damage of 355 nm IBS coatings. [ABSTRACT FROM AUTHOR]

HfO 2 monolayer coatings are grown by plasma-enhanced atomic layer deposition (PEALD), and the effects of the thermal annealing atmosphere and temperature on the surface morphology, crystal structure, chemical composition, optical absorption, and laser-induced damage threshold (LIDT) of the HfO 2 monolayer coatings are investigated. The experimental results show that annealing in an oxygen atmosphere is more beneficial to the decomposition of impurity compounds (carbonates and amines) and the elimination of oxygen deficiency in HfO 2 coating than in a nitrogen atmosphere. Compared to the as-deposited coating, the HfO 2 coating annealed under an oxygen atmosphere and specific temperature has lower C and N impurity contents, a better stoichiometric ratio, and thus lower absorption and higher LIDT. The highest LIDT (at 355 nm) of 6.3 J/cm2 is obtained at an annealing temperature of 700 ℃, which is approximately three times that of the as-deposited coating. We believe that this experimental result can help improve the LIDT of PEALD-grown oxide coatings or other oxide coatings containing similar impurities. • The effect of annealing on the properties of PEALD HfO 2 coatings is investigated. • The carbonates and amines in the HfO 2 coating decompose during annealing. • The oxygen-annealed HfO 2 coating has lower absorption and higher LIDT. • The oxygen-annealed HfO 2 coating shows different damage morphology. [ABSTRACT FROM AUTHOR]

Plate laser beam splitter (PLBS) coatings for intensity-splitting in high-power laser applications face increasing requirements, where the challenge is to simultaneously satisfy a given transmittance (T)/reflectivity (R) intensity-splitting ratio with a certain bandwidth, and a high laser damage threshold (LIDT). Traditionally, a given T/R ratio is achieved by using a non-quarter-wave design. We propose a quarter-wave design strategy for arbitrary T/R ratios by using mixture layers with tunable refractive index (n) and optical bandgap as high- n layers. Two quarter-wave PLBS coatings based on HfO 2 –Al 2 O 3 mixture with a designed T/R ratio of 50:50 are experimentally demonstrated and compared with the traditional PLBS coating. The mixture-based PLBS coating shows good spectral performance, low surface roughness, and high LIDT. For an s -polarized 8 ns pulse laser at a wavelength of 1064 nm, a mixture-based PLBS coating design can improve LIDT by a factor of ∼ 2 with a slightly wider bandwidth. This tunable mixture-based PLBS coating design strategy provides support for the increasingly high output power of high-power laser systems. [ABSTRACT FROM AUTHOR]

[Display omitted] • First studied on the properties of mixture coating for picosecond laser applications. • Systematically studied the influence of Al 2 O 3 doping and annealing on the properties of HfO 2 -Al 2 O 3 mixture coating. • The properties of the mixture coatings may be improved by increasing the doped Al 2 O 3 content and annealing treatment. • Provide significantly support for the preparation of reflective coatings with a higher picosecond damage threshold. HfO 2 -Al 2 O 3 mixture coatings with different Al 2 O 3 doping contents are deposited on fused silica substrate using an electron-beam co-evaporation process. The effects of the material composition and thermal annealing temperature on the chemical states, crystal structure, transmittance spectra, refractive index, optical band gap, and picosecond laser-induced damage threshold (LIDT) properties of these HfO 2 -Al 2 O 3 mixture coatings are investigated. Characterization measurements confirmed that the properties of the mixture coatings may be improved by increasing the doped Al 2 O 3 content and thermal annealing. The experimental results show that, firstly, with the increase of the doped Al 2 O 3 content, the optical band gap and the LIDTs of the HfO 2 -Al 2 O 3 mixture coating increase monotonically. Secondly, the highest LIDT of 7.1 J/cm2 is obtained at an annealing temperature of 500 °C, which is ∼ 20 % higher than that of the as-deposited coating. The S-M 2 coating annealed at 500 ℃ shows a similar LIDT and a higher refractive index as compared to the pure Al 2 O 3 , which provides significantly support for the preparation of reflective coatings with a higher picosecond damage threshold. [ABSTRACT FROM AUTHOR]

Abstract: The feasibility of the idea of double stack HR coating was discussed in this paper both in theory and experiment. The theoretical simulation was made by employing optical coating design software. The analysis results showed that the design of double stack HR coating was feasible, which made the HR coating have ascendancy not only at reflectance but also at laser damage resistance. Then, the LaF3/MgF2 HR coating, the HfO2/SiO2 HR coating and the double stack HR coating were prepared for comparison, respectively. Transmittance spectra, surface morphologies and damage morphologies of these coatings were measured. Measurement of laser-induced damage threshold (LIDT) of S polarized light of the samples was performed at 355nm, 45° incidence. The measurement results showed that the LIDT value of the LaF3/MgF2 HR coating with 30 layers was very high, but the reflectance was low. When the layer number was increased up to 36, lots of cracks appeared on the surface of the LaF3/MgF2 HR coating, with the LIDT badly declining. It was thought that the residual stress resulted in the cracks and the decline of the LIDT. The spectra measurement showed the double stack HR coatings could provide higher reflectance and wider reflection band than LaF3/MgF2 HR coating with less layer pairs. Any crack was also not found on the surface of the double stack coatings. Meanwhile, the double stack HR coatings possessed greater laser damage resistances than the HfO2/SiO2 HR coating. The damage morphologies showed that the damage of the double stack coating was even milder than that of the HfO2/SiO2 coating. Therefore, the double stack design was effective to gain high reflectance and great UV laser radiation resistance simultaneously. [Copyright &y& Elsevier]

Abstract: Laser conditioning effects of the dielectric mirror coatings in vacuum environments were investigated. The laser-induced damage thresholds (LIDT) in vacuum environments before and after laser conditioning were compared. It is found that laser conditioning in vacuum environments decrease the LIDT of the component. Laser conditioning effects in vacuum and atmosphere environments were also compared and investigated. The negative effects of laser conditioning in vacuum environments were discussed and analyzed with defect statistical model, energy dispersive X-ray analysis and absorption measurements. [Copyright &y& Elsevier]

Abstract: The transmission guided-mode resonance filters are implemented by integration of diffraction grating into classical thin films to produce high efficiency in the central wavelength and arbitrarily low sideband response over a quite large spectral range. Transmission guided-mode resonance filters require considerable fewer thin films to acquire narrow line width and high peak transmission in the central wavelength compared with classical multilayer high-reflectance coatings with a stack of quarter-wave thickness. The properties of transmission filters with single/double waveguide grating in the different layers of high refection stacks are compared each other. It is demonstrated that the narrow line width transmission filters can be abstained with only two different materials. [Copyright &y& Elsevier]

Abstract: TiO2 thin films were prepared by electron beam evaporation at different oxygen partial pressures. The influences of oxygen partial pressure on optical, mechanical and structural properties of TiO2 thin films were studied. The results showed that with the increase of oxygen partial pressure, the optical transmittance gradually increased, the transmittance edge gradually shifted to short wavelength, and the corresponding refractive index decreased. The residual stresses of all samples were tensile, and the value increased as oxygen partial pressure increasing, which corresponded to the evolutions of the packing densities. The structures of TiO2 thin films all were amorphous because deposition particles did not possess enough energy to crystallize. [Copyright &y& Elsevier]

Abstract: A model for refractive index of stratified dielectric substrate was put forward according to theories of inhomogeneous coatings. The substrate was divided into surface layer, subsurface layer and bulk layer along the normal direction of its surface. Both the surface layer (separated into N 1 sublayers of uniform thickness) and subsurface layer (separated into N 2 sublayers of uniform thickness), whose refractive indices have different statistical distributions, are equivalent to inhomogeneous coatings, respectively. And theoretical deduction was carried out by employing characteristic matrix method of optical coatings. An example of mathematical calculation for optical properties of dielectric coatings had been presented. The computing results indicate that substrate subsurface defects can bring about additional bulk scattering and change propagation characteristic in thin film and substrate. Therefore, reflectance, reflective phase shift and phase difference of an assembly of coatings and substrate deviate from ideal conditions. The model will provide some beneficial theory directions for improving optical properties of dielectric coatings via substrate surface modification. [Copyright &y& Elsevier]

The high optical performance and laser-induced damage threshold (LIDT) of broadband hafnium oxide/silica (HfO 2 /SiO 2) dichroic coatings with high transmittance and reflectance around 532 and 1064 nm, respectively, are essential for the efficiency of a harmonic separation system. However, the transmittance of dichroic coatings tends to drop rapidly at 532 nm because of the half-wave hole effect. Moreover, an intense electric field penetrates the coating (~6 μm thick) to the substrate, thereby generating a challenge to improve the LIDT at 532 nm. In this paper, we study the methods to improve the optical performance and LIDT of HfO 2 /SiO 2 dichroic coatings prepared by electron-beam evaporation. The inhomogeneity in the growth characteristics of the HfO 2 layer is studied and considered in the design of dichroic coatings, which can improve spectral performance, especially by broadening the transmittance bandwidth around 532 nm. Additionally, the effects of the different treatment procedures, including ultrasonic cleaning, acid-solution etching, and argon-ion-beam etching, of the fused silica substrate on the LIDT of dichroic coatings are investigated by the raster-scan damage test method. We observe that the LIDT of dichroic coatings at 532 nm is limited by the surface and subsurface defects of the substrate. Etching ~200 nm of the surface of the fused silica substrate can effectively inhibit the occurrence of low-energy catastrophic growth damage. Compared with acid-solution etching, argon-ion-beam etching can yield improved substrate surface quality and increased LIDTs of dichroic coatings at 532 nm. • The refractive index inhomogeneity of the HfO 2 single layer is consistent with that of the HfO 2 layer in dichroic coatings. • HfO 2 /SiO 2 dichroic coatings considering the refractive-index inhomogeneity of HfO 2 layer inhibit the half-wave hole effect. • Laser damage at 532 nm mainly originates from the substrate subsurface defects in the redeposition (Beilby) layer. • Argon-ion-beam etching can bring better substrate surface quality and higher LIDTs of dichroic coatings at 532 nm. [ABSTRACT FROM AUTHOR]

• Deeper understanding of moisture-induced instability of electron-beam coatings was achieved by prolonging the originally rapid water adsorption process with a dense capping layer. • Water transport in electron-beam coatings included four steps: filling, stabilization, swelling and refilling. • Water molecule content and structure evolution led to the increasing compressive stress evolution at the first stage and subsequent transition from compressive to tensile stress evolution. • A model based on the finite element method was proposed to calculate the water vapor transmission rate of electron-beam coatings. The moisture-induced instability of electron-beam (e-beam) coating can even result in the performance instability of a large laser system. A dense plasma-ion-assisted-deposition SiO 2 capping layer was employed to isolate the top surface of the coating from ambient humidity and extend the originally rapid water adsorption process, allowing a deeper understanding of the instability of e-beam coatings caused by moisture. Spectral measurements suggested that four water adsorption steps, including filling, stabilization, swelling and refilling, led to the overall redshift and short-term fluctuations in spectra. The stress and Fourier transform infrared analysis revealed that water adsorption and ice-like/ice structure water was responsible for the increasing compressive stress evolution at the first stage and subsequent transition from compressive to tensile stress evolution, respectively. A model based on the finite element method was proposed to calculate the water vapor transmission rate of e-beam coatings. Our study on the underlying mechanism of moisture-induced instability of e-beam coating is helpful to ensure the reliability and stability of large laser systems. [ABSTRACT FROM AUTHOR]