15 results on '"Beckx, Stephan"'
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2. Integrating high-k dielectrics: etched polysilicon or metal gates? (Etch)
3. Silicon nanophotonic wire structures fabricated by 193nm optical lithography
4. Profile control of novel non-Si gates using BCl[sub 3]∕N[sub 2] plasma
5. Compact Wavelength-Selective Functions in Silicon-on-Insulator Photonic Wires
6. Linear and Nonlinear Nanophotonic Devices Based on Silicon-on-Insulator Wire Waveguides
7. Integration of HIMOS Flash Memory in a 90nm CMOS Technology
8. Silicon-on-insulator nanophotonics
9. Influence of oxide hard mask on profiles of sub-100 nm Si and SiGe gates
10. Low-loss photonic wires and compact ring resonators in silicon-on-insulator
11. Large-scale production techniques for photonic nanostructures
12. Status 157-nm lithography development at IMEC
13. Overbake: sub-40-nm gate patterning with ArF lithography and binary masks.
14. Low Loss Nanophotonic Waveguides and Ring Resonators in Silicon-on-Insulator.
15. Profile control of novel non-Si gates using BCl3/N2 plasma.
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