1. New Alumina Substrate for Hybrid Integrated Circuits
- Author
-
J. Nakamura, M. Nakamura, K. Niwa, and K. Murakawa
- Subjects
Materials science ,General Engineering ,Tantalum ,chemistry.chemical_element ,Integrated circuit ,Substrate (electronics) ,Industrial and Manufacturing Engineering ,Electronic, Optical and Magnetic Materials ,law.invention ,Smooth surface ,chemistry.chemical_compound ,Film capacitor ,chemistry ,Tantalum nitride ,law ,Electronic engineering ,Tantalum oxide ,Electrical and Electronic Engineering ,Composite material - Abstract
A new alumina substrate with an extremely smooth surface was developed. This new alumina substrate includes Cr203and MgO as the additives. Reliability data and characteristics of tantalum nitride or tantalum and tantalum oxide films on the new substrate were compared with those on the glazed alumina.
- Published
- 1974