Search

• Four hybrid materials (HfO 2 /Al 2 O 3 nanolaminate, HfO 2 /SiO 2 nanolaminate, HfO 2 -Al 2 O 3 mixture, and HfO 2 -SiO 2 mixture coatings) are investigated. • Hybrid materials show suppressed crystallization and reduced surface roughness, enabling tunable bandgaps and optical constants. • Hybrid-material-based mirror coatings are investigated and mixture-based mirror coatings have the highest LIDT. • The damage initiation mechanism of the mirror coating varies around 3 ps for laser pulses ranging from 0.5 to 8 ps.. Four hybrid materials (HfO 2 /Al 2 O 3 nanolaminate, HfO 2 /SiO 2 nanolaminate, HfO 2 –Al 2 O 3 mixture, and HfO 2 –SiO 2 mixture) and four hybrid-material-based mirror coatings are prepared via electron-beam evaporation. The refractive index (n), optical bandgaps, and microstructural properties of the hybrid materials are investigated and compared with those of pure materials. Experimental results show that the hybrid materials suppress crystallization, reduce surface roughness, and provide tunable bandgaps and optical constants. Among the four hybrid materials with similar n values, the HfO 2 –Al 2 O 3 mixture shows the largest bandgap. All the hybrid-material-based mirror coatings exhibit a higher laser-induced damage threshold (LIDT) at 8 picosecond (ps) than the conventional pure-material-based mirror coating. The HfO 2 –Al 2 O 3 mixture-based mirror coating with a relative high LIDT is used for further study of the pulse width dependence of the LIDT, and shows superior LIDT over the conventional mirror coating at 0.5 ps, 1 ps and 3 ps. Typical damage morphological features induced at different pulse widths show that the damage-initiation mechanism of the mirror coating changes around 3 ps. [ABSTRACT FROM AUTHOR]

The ever-increasing demand for broadband antireflection (AR) coatings has led to a growing interest in nanolaminates (NLs) with tunable properties. However, achieving excellent optical performance in NLs can be challenging due to multiple interfaces and a rather thin sublayer. In this study, we systematically investigated the factor that deteriorates the optical performance, focusing on the sublayer thickness deviation, sublayer n deviation, and interfacial diffusion, to correct the n -profiles of NLs. A pre-correction strategy for the AR coating design is proposed and experimentally demonstrated via plasma-enhanced atomic layer deposition. The excellent fit of the spectrum demonstrates that the proposed design strategy can benefit structure-sensitive NL-based coatings. [Display omitted] • The factor that deteriorates the optical performance of nanolaminate-based broadband AR coatings has been systematically investigated. • Depending on the relative magnitudes of the interfacial diffusion and sublayer thicknesses, plasma-enhanced atomic-layer-deposited HfO 2 –SiO 2 nanolaminates were categorized into three typical types. • A pre-correction strategy considering the sublayer thickness deviation, sublayer refractive index (n) deviation, and interfacial diffusion, to correct the n -profiles of nanolaminates was proposed and experimentally demonstrated via plasma-enhanced atomic layer deposition. • The broadband AR coating with pre-correction exhibits excellent agreement between the designed and measured spectra, with a root-mean-square error of <0.100, well below that without any pre-correction. • The significant improvement in the fitness of the spectra and coating-layer thickness between the design and experimentally measurement demonstrates that the proposed pre-correction design strategy can benefit other nanolaminate-based coatings whose spectral performance is sensitive to the coating structure. [ABSTRACT FROM AUTHOR]

• HfO 2 –SiO 2 mixture coatings with different proportions were investigated. • Admixing 10% or higher SiO 2 in the mixture coatings suppresses inhomogeneity of HfO 2. • Short-wave pass dichroic laser mirror coatings were prepared using mixture layers. • Using HfO 2 –SiO 2 mixture layers fundamentally solves the half-wave hole effect. • Using different mixture layers gets further optical improvement in the pass band. Hafnia/silica (HfO 2 /SiO 2) short-wavelength pass dichroic laser mirror (DLM) coatings are widely utilized in high-power laser systems. However, the half-wave hole effect resulting from the refractive index inhomogeneity of HfO 2 severely restricts the spectra and potential applications of these coatings. To address this issue, an investigation was conducted on HfO 2 –SiO 2 mixture coatings with different proportions, which were produced by electron beam co-evaporation. Compared to the inhomogeneous growth characteristics observed in pure HfO 2 coatings, the introduction of 10 % or higher SiO 2 admixing in HfO 2 –SiO 2 mixture coatings results in an amorphous structure characterized by excellent refractive index homogeneity and improved surface smoothness. Leveraging this, different DLM coatings with the objective of achieving high transmittance across the 400 to 900 nm range were designed and prepared, while ensuring high reflectance at 1064 nm. The incorporation of HfO 2 –SiO 2 mixture layers instead of pure HfO 2 layers in the mirror coatings led to a fundamental inhibition of the half-wave hole effect throughout the entire broad transmission band, resulting in a substantial improvement in the optical performance of the coatings. Moreover, by incorporating several types of HfO 2 –SiO 2 mixture layers with different proportions in the coating stacks, the transmittance of DLM coatings in the pass band can be further increased, and the transmission fluctuations at different wavelengths can be further compressed. Additionally, compared to traditional DLM coatings with HfO 2 layers, DLM coatings incorporating HfO 2 –SiO 2 mixture layers exhibit lower roughness, higher laser-induced damage threshold (LIDT) at 532 nm, and similar LIDT at 1064 nm. These results indicate a promising strategy for fabricating DLM coatings tailored for high-power laser systems. [ABSTRACT FROM AUTHOR]