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Abstract Reservoir computing (RC) is a bio-inspired neural network structure which can be implemented in hardware with ease. It has been applied across various fields such as memristors, and electrochemical reactions, among which the micro-electro-mechanical systems (MEMS) is supposed to be the closest to sensing and computing integration. While previous MEMS RCs have demonstrated their potential as reservoirs, the amplitude modulation mode was found to be inadequate for computing directly upon sensing. To achieve this objective, this paper introduces a novel MEMS reservoir computing system based on stiffness modulation, where natural signals directly influence the system stiffness as input. Under this innovative concept, information can be processed locally without the need for advanced data collection and pre-processing. We present an integrated RC system characterized by small volume and low power consumption, eliminating complicated setups in traditional MEMS RC for data discretization and transduction. Both simulation and experiment were conducted on our accelerometer. We performed nonlinearity tuning for the resonator and optimized the post-processing algorithm by introducing a digital mask operator. Consequently, our MEMS RC is capable of both classification and forecasting, surpassing the capabilities of our previous non-delay-based architecture. Our method successfully processed word classification, with a 99.8% accuracy, and chaos forecasting, with a 0.0305 normalized mean square error (NMSE), demonstrating its adaptability for multi-scene data processing. This work is essential as it presents a novel MEMS RC with stiffness modulation, offering a simplified, efficient approach to integrate sensing and computing. Our approach has initiated edge computing, enabling emergent applications in MEMS for local computations.

To mitigate the impact of low-frequency noise from the tunnel magnetoresistance (TMR) current sensor and ambient stray magnetic fields on weak current detection accuracy, we propose a high-resolution modulation-demodulation test method. This method modulates and demodulates the measurement signal, shifting low-frequency noise to the high-frequency band for effective filtering, thereby isolating the target signal from the noise. In this study, we developed a Simulink model for the TMR current sensor modulation-demodulation test method. Practical time-domain and frequency-domain tests of the developed high-resolution modulation-demodulation method revealed that the TMR current sensor exhibits a nonlinearity as low as 0.045%, an enhanced signal-to-noise ratio (SNR) of 77 dB, and a heightened resolution of 100 nA. The findings indicate that this modulation-demodulation test method effectively reduces the impact of low-frequency noise on TMR current sensors and can be extended to other types of resistive devices.