Search

To achieve an ultrahigh resolution of a beamline for soft X-rays at the Taiwan Photon Source (TPS), the profile of a highly precise grating is required at various curvatures. The slope error could be decreased to 0.1 µrad (rms) at a thermal load with a specially designed bender having 25 actuators. In the meantime, a long-trace profiler (LTP) was developed in situ to monitor the grating profile under a thermal load; it consists of a moving optical head, an air-bearing slide, an adjustable stand, and a glass viewport on the vacuum chamber. In the design of this system, a test chamber with an interior mirror was designed to simulate the chamber in the beamline. To prevent an error induced from a commercial viewport, a precision glass viewport (150CF, flatness 1/150 λ rms at 632.8 nm) was designed. The error induced from the slope error of the glass surface and the vacuum deformation was also simulated. The performance of the optical head of the LTP in situ (ISLTP) has been tested in the metrology laboratory. The sources of error of this LTP including the linearity and the glass viewport were corrected after the measurement. For the beamline measurement, an optical head was mounted outside the vacuum chamber; the measuring beam passed through the glass viewport to measure the grating profile in vacuum. The measurement of the LTP after correction of the above errors yielded a precision about 0.2 µrad (rms). In a preliminary test, an ISLTP was used to measure the grating profile at soft X-ray beamline TPS45A. The measured profile was for the bending mechanism to optimize the slope profile. From the measured energy spectrum, the slope error of the grating was estimated with software for optical simulation to be about 0.3 µrad (rms), consistent with our estimate of the ISLTP. In the future, it will be used to monitor the thermal bump under a large thermal load. In addition, an ISLTP was used to monitor the properties of optical elements-the twist and radius in the beamline during the installation phase.

The temperature-dependent hard X-ray excited optical luminescence (XEOL) spectroscopy was used to study the optical properties of O and Zn polarity of a c-plane single crystal ZnO wafer. By analyzing the XEOL and XRD, we found an unprecedented blue shift of the free exciton transition with increasing the excited carrier density as tuning the X-ray energy across the Zn K-edge, and the O-polar face possesses better crystal structure than the Zn-polar one. This spectral blue shift is attributed to the Coulomb screening of the spontaneous polarization by the excited free carriers that result in decreasing the exciton-phonon Frohlich interaction to reduce exciton binding energy.

A simple, but powerful, parallel image computing system based on a filtered back-projection algorithm [Dowd et al., Proc. SPIE 3772, 224 (1999)] has been implemented for computerized tomography (CT) in a distributed computing framework by connecting several personal computers (PC) via the Internet. The computing architecture consists of four major components: experimental control, publisher, subscribers, and 3D shaper. The system performance is optimized by an unequal data distribution scheme that takes the computation capability of each subscriber into account. Our result shows that it takes 4.4 s to calculate one two-dimensional charge coupled device projection image of 512×512 pixels when six Pentium III 800 MHz computers each equipped with 512 MB RAM are included in the system. The computation efficiency can be further improved if more computers are utilized. Under this framework, a faster-than-data-acquisition image process for computerized tomography is achievable. The performance of the system is t...

Quantitative phase retrieval with a sub-100-nm resolution is achieved from micrographs of a zone plate based transmission x-ray microscope. A plastic zone plate containing objects of sizes from micrometers down to tens of nanometers is used as a test sample to quantify the retrieved phase. Utilizing the focal serial images in the image plane, the phase information is retrieved quantitatively across the entire range of sizes by combining the transport intensity equation and self-consistent wave propagation methods in this partial coherence system. The study demonstrates a solution to overcome the deficiency encountered in the two phase retrieval approaches.

An energy-tunable transmission hard x-ray microscope with close to 60 nm spatial resolution in three dimensions (3D) has been developed. With a cone beam illumination, a zone plate of 50 nm outmost zone width, a stable mechanical design, and software feedback, we obtained tomographic data sets that are close to 60 nm spatial resolution. Meanwhile, the element specific imaging was also obtained by a differential absorption contrast technique used below and above the absorption of the element. Examples of advanced intergraded circuit devices are used to demonstrate the element selectivity and spatial resolution in 3D of the microscope.