1. Inverse ray-tracing method for nondestructive mapping of three-dimensional surfaces
- Author
-
I. Kelson, Eli Kapon, Y. Ducommun, and L. Arazi
- Subjects
Surface (mathematics) ,Materials science ,Optics ,business.industry ,Nondestructive testing ,Isotropy ,General Physics and Astronomy ,Inverse ,Ray tracing (graphics) ,Radiation ,business ,Parametrization ,Surface reconstruction - Abstract
A general method for nondestructive mapping of three-dimensional surfaces, particularly useful in cases where the surface is composed of a large array of identical depressions, is presented. The sample is first marked with a uniform flux of particles, which then act as isotropic sources of some detectable radiation. By measuring the emitted radiation from several directions, it is possible to reconstruct the surface using a parametrization coupled with a least squares fit procedure. As an example, we report on the experimental implementation of the algorithm to arrays of micron-scale inverted pyramids etched in GaAs substrates, using a particular sequence of alpha emitting atoms.
- Published
- 2004