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1. Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O2/Ar capacitively coupled plasma

Author

Kamataki, Kunihiro, primary, Nagamatsu, Daiki, additional, Yang, Tao, additional, Abe, Kohei, additional, Yamamoto, Akihiro, additional, Nagao, Iori, additional, Arima, Toshiaki, additional, Otaka, Michihiro, additional, Yamamoto, Yuma, additional, Yamashita, Daisuke, additional, Okumura, Takamasa, additional, Yamashita, Naoto, additional, Itagaki, Naho, additional, Koga, Kazunori, additional, and Shiratani, Masaharu, additional

Published
2022
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