1. Self-Aligned Nanotube–NanowirePhaseChange Memory.
- Author
-
Xiong, Feng, Bae, Myung-Ho, Dai, Yuan, Liao, Albert D., Behnam, Ashkan, Carrion, Enrique A., Hong, Sungduk, Ielmini, Daniele, and Pop, Eric
- Subjects
- *
SELF-alignment (Materials science) , *NANOTUBES , *NANOWIRES , *PHASE change memory , *NANOELECTRONICS , *FERROELECTRIC RAM - Abstract
A central issue of nanoelectronics concerns their fundamentalscaling limits, that is, the smallest and most energy-efficient devicesthat can function reliably. Unlike charge-based electronics that areprone to leakage at nanoscale dimensions, memory devices based onphase change materials (PCMs) are more scalable, storing digital informationas the crystalline or amorphous state of a material. Here, we describea novel approach to self-align PCM nanowires with individual carbonnanotube (CNT) electrodes for the first time. The highly scaled andspatially confined memory devices approach the ultimate scaling limitsof PCM technology, achieving ultralow programming currents (∼0.1μA set, ∼1.6 μA reset), outstanding on/off ratios(∼103), and improved endurance and stability atfew-nanometer bit dimensions. In addition, the powerful yet simplenanofabrication approach described here can enable confining and probingmany other nanoscale and molecular devices self-aligned with CNT electrodes. [ABSTRACT FROM AUTHOR]
- Published
- 2013
- Full Text
- View/download PDF