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Start Over Author "Baniecki, J. D." Publisher american institute of physics, inc.
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1. Investigation of the importance of interface and bulk limited transport mechanisms on the leakage current of high dielectric constant thin film capacitors

Author

Baniecki, J. D., Shioga, T., Kurihara, K., and Kamehara, N.

Subjects
Dielectric films -- Electric properties, Thin films -- Electric properties, Thermionic emission -- Research, Physics
Abstract

The importance of interface and bulk transport mechanism on the leakage current of high dielectric constant thin films capacitors is examined by deriving an equation for the J-V(sub A) characteristic of a capacitor that includes the transport mechanisms of thermionic emission (TE), thermionic field emission, (TFE), and carrier drift-diffusion (DD). Implications of these results on existing transport calculations for high dielectric constant thin films capacitors are discussed.

Published
2003

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