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Start Over Author "Kreissig, Ulrich" Publisher american institute of physics, inc.
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1. Elastic modulus of amorphous boron suboxide thin films studied by theoretical and experimental methods

Author

Music, Denis, Kreissig, Ulrich, Chirita, Valeriu, Schneider, Jochen M., and Helmersson, Ulf

Subjects
Dielectric films -- Research, Thin films -- Research, Physics
Abstract

Experimental and theoretical findings, which correlate changes in chemical composition and film density to the elastic properties, are reported. The variation in the B-O bond fraction and the film density is important to understand elastic behavior of a-BO(sub x) system.

Published
2003

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