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Your search keyword '"Metal oxide semiconductors -- Composition"' showing total 2 results
Start Over Descriptor "Metal oxide semiconductors -- Composition" Publisher american institute of physics, inc.
2 results on '"Metal oxide semiconductors -- Composition"'

1. Plasma-assisted atomic layer deposition of TiN/[Al.sub.2][O.sub.3] stacks for metal-oxide-semiconductor capacitor applications

Author

Hoogeland, D., Jinesh, K.B., Roozeboom, F., Besling, W.F.A., van de Sanden, M.C.M., and Kessels, W.M.M.

Subjects
Aluminum oxide -- Electric properties, Aluminum oxide -- Structure, Electric fields -- Analysis, Metal oxide semiconductors -- Composition, Metal oxide semiconductors -- Electric properties, Titanium compounds -- Electric properties, Physics
Abstract

The application of the plasma-assisted atomic layer deposition of the TiN/[Al.sub.2][O.sub.3] thin films for metal-oxide-semiconductor capacitor applications are discussed. The devices are shown to be extremely efficient and effective, as it can easily sustain high electric fields.

Published
2009

2. Integrated on-chip inductors using magnetic materials (invited)

Author

Gardner, Donald S., Schrom, Gerhard, Hazucha, Peter, Paillet, Fabrice, Karnik, Tanay, Borkar, Shekhar, Hallstein, Roy, Dambrauskas, Tony, Hill, Charles, Linde, Clark, Worwag, Wojciech, Baresel, Robert, and Muthukumar, Sriram

Subjects
Cobalt alloys -- Electric properties, Copper -- Electric properties, Copper -- Magnetic properties, Inductors -- Design and construction, Metal oxide semiconductors -- Composition, Metal oxide semiconductors -- Magnetic properties, Metal oxide semiconductors -- Electric properties, Physics
Abstract

Inductor structures are prepared by using [micro]m thick copper metallization and two levels of CoZrTa as part of a 90 nm complementary metal-oxide semiconductor (CMOS) process. The studies have shown that the inductors with thick copper and thicker magnetic films have resistance as low as 0.04 [omega] and quality factors up to 8 at frequencies as low as 40 MHz.

Published
2008

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