1. Origin of the spatial resolution in atom probe microscopy.
- Author
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Gault, Baptiste, Moody, Michael P., de Geuser, Frederic, Haley, Daniel, Stephenson, Leigh T., and Ringer, Simon P.
- Subjects
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ATOMS , *OPTICAL instruments , *SPECTRUM analysis , *PHYSICAL & theoretical chemistry , *OPTOELECTRONIC devices , *ELECTRONIC equipment , *ELECTROOPTICAL devices - Abstract
Atom-probe microscopy offers unprecedented insights on the subnanometer structure and chemistry of materials in three dimensions. The actual spatial resolution achievable is however still an uncertain parameter, as no comprehensive study has been undertaken to unveil the physics underpinning how key parameters impact the performance. Here, we present a comprehensive investigation of the in-depth and lateral resolution of the technique. We discuss methods to estimate the resolution and show a resolution better than 20 pm in-depth. Models to support our results were developed and are discussed in the present letter. [ABSTRACT FROM AUTHOR]
- Published
- 2009
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