Search

Experiments with a Langmuir probe and optical emission spectroscopy combined with actinometry were carried out in inductive CF4/O2 discharges at three pressures of 8, 15, and 25 mTorr. The measured electron energy probability functions are approximately Maxwellian at any oxygen content. The measured electron density decreases with increasing the oxygen in the oxygen content below 20%, beyond which it remains nearly constant. On the other hand, the measured electron temperature is not sensitive to the content. The atomic fluorine density estimated by actinometry increases markedly as oxygen is mixed to CF4 discharges, and then reaches the maximum around the oxygen content of 20%–30%, beyond which it decreases with increasing oxygen content. The atomic oxygen density increases with the increase in the oxygen content except for the oxygen content higher than 90%. A global model for electronegative plasma is used in order to investigate the plasma chemistry in CF4/O2 discharges assuming the Maxwellian electron energy distribution. The model results are compared with the experimental results, obtaining reasonably good agreement. [ABSTRACT FROM AUTHOR]

Reports on a theoretical study on electronic states of carbon monofluoride and on the predissociation of the lower lying states by multi reference single and double excitations configuration interaction (MRDCI) calculations. Ab initio MRDCI calculations on the doublet electronic states of carbon monofluoride; Potential energy curves.

Silicene is the graphene-like silicon nanosheet, which has been synthesized very recently [B. Lalmi, H. Oughaddou, H. Enriquez, A. Kara, S. Vizzini, B. Ealet, and B. Aufray, Appl. Phys. Lett. 97, 223109 (2010)]. Using first-principles calculations, we systematically investigate the structures and properties of fluorinated and hydrogenated silicene, the silicon analogues of graphane. Different from the carbon-counterpart, the fluorination prefers the conformation with a zigzag-line buckling, while the hydrogenation keeps the chair conformation similar to graphane. A direct band gap is opened in the silicene fluoride, and the gap values can be continuously modulated by the strain. While for the hydride, a strain-induced indirect-to-direct band gap transition is found. [ABSTRACT FROM AUTHOR]

We synthesize and study the structural and optical properties of nanocrystalline graphene monofluoride and graphite monofluoride, which are carbon-based wide band gap materials. Using laser excitations 2.41-5.08 eV, we identify six emission modes of graphite monofluoride, spanning the visible spectrum from red to violet. The energy and linewidth of the modes point to defect-induced midgap states as the source of the photoemission. We discuss possible candidates. Our findings open the window to electro-optical applications of graphene fluoride. [ABSTRACT FROM AUTHOR]

The superior characteristics of the fluorinated HfO2/SiON gate dielectric are investigated comprehensively. Fluorine is incorporated into the gate dielectric through fluorinated silicate glass (FSG) passivation layer to form fluorinated HfO2/SiON dielectric. Fluorine incorporation has been proved to eliminate both bulk and interface trap densities due to Hf–F and Si–F bonds formation, which can strongly reduce trap generation as well as trap-assisted tunneling during subsequently constant voltage stress, and results in improved electrical characteristics and dielectric reliabilities. The results clearly indicate that the fluorinated HfO2/SiON gate dielectric using FSG passivation layer becomes a feasible technology for future ultrathin gate dielectric applications. [ABSTRACT FROM AUTHOR]