1. Selective wet oxidation of AlAsSb alloys on GaAs.
- Author
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Calvez, Stephane, Stepanenko, Oleksandr, Louarn, Kevin, Daran, Emmanuelle, Arnoult, Alexandre, and Almuneau, Guilhem
- Subjects
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AUDITING standards , *GALLIUM arsenide , *OXIDATION kinetics , *ALLOYS , *LOW temperatures - Abstract
In this paper, the oxidation of thin low-Sb-containing AlAsSb layers quasi-lattice matched on GaAs substrates is studied in detail since, compared to AlGaAs, these alloys had the prospects of being laterally oxidized at a faster rate, at lower process temperatures, and with a reduced volume change. Combining monitoring data of the oxidation kinetics and anisotropy with atomic-force-microscopy surface measurements enables us to establish the optimal composition range and process parameters that lead to nearly isotropic and Sb-segregation-free oxidations. The study also shows that strain plays a central role in triggering the detrimental Sb segregation. [ABSTRACT FROM AUTHOR]
- Published
- 2021
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