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The mechanism leading to gas damping in Micro-Electro-Mechanical Systems (MEMS) devices vibrating at high frequencies is investigated by using the linearized Boltzmann equation based on the ellipsoidal statistical (ES) model. Knowing that walls with different physical structures are used in designing micromachines, general boundary conditions of Maxwell's type have been considered to describe the gas-wall interactions. [ABSTRACT FROM AUTHOR]

We consider a Micro-Electro-Mechanical Systems (MEMS) device vibrating at high frequency. We present (theoretical and numerical) computations allowing to assess the damping of the gas trapped in the channel of the device. Semiexplicit solutions for the transient and permanent regimes associated to the linearized BGK equations with Maxwellian boundary conditions and a periodic forcing are established. Then, different numerical methods are briefly described for the treatment of these equations. [ABSTRACT FROM AUTHOR]

In this paper, we propose a formal Chapman-Enskog expansion in the context of mixtures of monoatomic and polyatomic gases. We start from a Boltzmann model that is based on the Borgnakke-Larsen procedure ([14]) and we derive a compressible Navier-Stokes system. In a last part, we perform some explicit computations of the transport coefficients in the case of Maxwell molecules for diatomic gases. [ABSTRACT FROM AUTHOR]