1. Hard x-ray nano patterning using a sectioned multilayer.
- Author
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Su Yong Lee, In Hwa Cho, Jae Myung Kim, Hanfei Yan, Conley, Ray, Chian Liu, Macrander, Albert T., Maser, Jörg, Stephenson, G. Brian, Hyon Chol Kang, and Do Young Noh
- Subjects
X-rays ,RAYLEIGH waves ,NANOSTRUCTURES ,LITHOGRAPHY ,OPTICS - Abstract
We report a hard x-ray patterning capable of drawing lines with a width below100 nm using x-rays at 0.165 nm. A specially prepared mask based on multilayer growth technology was used as an x-ray mask effectively. The x-ray Talbot effect in near field was investigated and utilized in the patterning. Since multilayers with a few nanometer layer spacing are readily available, the proposed hard x-ray nano patterning, free of the limit imposed by the Rayleigh criterion in optical range, can potentially be an ultimate optical lithography technique. [ABSTRACT FROM AUTHOR]
- Published
- 2011
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