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A total-reflection zone plate (TRZP), which is a reflective grating that generates a line focus of hard X-rays, was developed. Newly designed TRZPs, introducing a laminar grating concept, were fabricated with various zone parameters. The focusing performances with regard to the beam size and the diffraction efficiency were evaluated using synchrotron radiation X-rays of 10 keV energy. Although the beam sizes measured are insufficient in comparison with the ideal value, the maximum diffraction efficiency, measured at 20%, exceeds the limitations of conventional TRZPs based on a binary grating. [ABSTRACT FROM AUTHOR]

Multilayer zone plate (MZP) technology for hard X-ray focusing was upgraded and its focusing performance was evaluated using 20-keV X-rays at the synchrotron beamline (BL24XU) of SPring-8. The MZP consists of MoSi2 and Si layers alternately deposited on a glass fiber by magnetron sputtering so that all zone boundaries satisfy the Fresnel zone configuration. The focused beam was evaluated using knife-edge scanning in which the measured intensity distribution is identical to the line spread function (LSF) in the focal plane. The focused beamsize of about 30 nm was estimated by oscillation peaks observed in the measured LSF according to Rayleigh's criterion. [ABSTRACT FROM AUTHOR]