1. Getter sputtering system for high-throughput fabrication of composition spreads.
- Author
-
Gregoire JM, van Dover RB, Jin J, Disalvo FJ, and Abruña HD
- Subjects
- Combinatorial Chemistry Techniques methods, Equipment Design, Equipment Failure Analysis, Materials Testing methods, Combinatorial Chemistry Techniques instrumentation, Heating instrumentation, Ions, Manufactured Materials radiation effects, Materials Testing instrumentation
- Abstract
We describe a sputtering system that can deposit composition spreads in an effectively UHV environment but which does not require the high-throughput paradigm to be compromised by a long pump down each time a target is changed. The system deploys four magnetron sputter guns in a cryoshroud (getter sputtering) which allows elements such as Ti and Zr to be deposited with minimal contamination by oxygen or other reactive background gases. The system also relies on custom substrate heaters to give rapid heating and cool down. The effectiveness of the gettering technique is evaluated, and example results obtained for catalytic activity of a pseudoternary composition spread are presented.
- Published
- 2007
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