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Flexoelectricity, a universal electromechanical coupling effect present in all dielectric materials, has garnered significant theoretical and experimental interest in recent years, particularly in ferroelectric perovskite oxides. However, nitride-based materials have received considerably less attention. In this Letter, we report the observation of direct flexoelectric effect in plasma-enhanced chemical vapor deposition silicon nitride thin film with a thickness of 200 nm. From three-point bending tests, we determined the effective flexoelectric coefficient of Si3N4 to be 1.64 ± 0.22 nC / m. Additionally, the measured flexoelectric-induced voltages are consistent with finite element computational models. This observation of the flexoelectric coupling effect could contribute to the development of silicon nitride-based micro-scale devices. [ABSTRACT FROM AUTHOR]

Stiction is a major failure mode in microelectromechanical systems (MEMS). Undesirable stiction, which results from contact between surfaces, threatens the reliability of MEMS severely as it breaks the actuation function of MEMS switches, for example. Although it may be possible to avoid stiction by increasing restoring forces using high spring constants, it follows that the actuation voltage has also to be increased significantly, which reduces the efficiency. In our research, an electrostatic-structural analysis is performed to estimate the proper design range of the equivalent spring constant, which is the main factor of restoring force in MEMS switches. The upper limit of equivalent spring constant is evaluated based on the initial gap width, the dielectric thickness, and the expected actuation voltage. The lower limit is assessed on the value of adhesive forces between the two contacting rough surfaces. The MEMS devices studied here are assumed to work in a dry environment. In these operating conditions only the van der Waals forces have to be considered for adhesion. A statistical model is used to simulate the rough surface, and the Maugis’s model is combined with Kim’s expansion to calculate adhesive forces. In the resulting model, the critical value of the spring stiffness depends on the material and surface properties, such as the elastic modulus, surface energy, and surface roughness. The aim of this research is to propose simple rules for design purposes. [ABSTRACT FROM AUTHOR]

Acoustic tweezers are increasingly utilized for the contactless manipulation of small particles. This paper provides a theoretical model demonstrating the acoustic manipulation capabilities of single-beam acoustic transducers. Analytical formulas are derived for the acoustic radiation force on an isotropic spherical object of arbitrary size, centered on a circular piston, simply supported and clamped radiator in an inviscid fluid. Using these results, the existence of a negative axial force pulling the object closer to the radiator is revealed and explored. These findings offer further insight into the feasibility of trapping objects in the near-field of a single-beam acoustic transducer. The calculations illustrate the trapping capabilities of the different emitters as a function of radiator size, particle size, and distance from the source and highlight the impact of radiator boundary conditions. Manipulation of a cell-like fluid sphere in water and an expanded polystyrene sphere in air are studied in more detail with results that are validated through finite element analysis. The developed theoretical model allows fast evaluation of acoustic radiation forces which could aid in the development of relatively simple and inexpensive contactless manipulation solutions.