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Positron annihilation spectroscopy has been used to study GaN grown by metal-organic chemical vapor deposition on misoriented 4H-SiC substrates. Two kinds of vacancy defects are observed: Ga vacancies and larger vacancy clusters in all the studied layers. In addition to vacancies, positrons annihilate at shallow traps that are likely to be dislocations. The results show that the vacancy concentration increases and the shallow positron trap concentration decreases with the increasing substrate misorientation. [ABSTRACT FROM AUTHOR]

Positron annihilation spectroscopy is used to study vacancy defects in GaN grown by molecular-beam epitaxy due to different polar directions and varying stoichiometry conditions during oxygen doping. We show that Ga-polar material is free of compensating Ga vacancies up to [O]=1018 cm-3 in Ga stable growth, but high concentrations of VGa are formed in N-stable conditions. We also show that vacancy clusters are formed in N-polar material grown in Ga stable conditions, which may be related to the higher reactivity of the N-polar surface. These clusters have no apparent influence on the electrical properties of the material. We thus infer that their charge state is neutral. © 2004 American Institute of Physics. [ABSTRACT FROM AUTHOR]