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Dopant impurity species can be incorporated into the silicon (001) surface via the adsorption and dissociation of simple precursor molecules. Examples include phosphine (PH3), arsine (AsH3), and diborane (B2H6) for the incorporation of phosphorus, arsenic, and boron, respectively. Through exploitation of precursor surface chemistry, the spatial locations of these incorporated dopants can be controlled at the atomic scale via the patterning of a hydrogen lithographic resist layer using scanning tunneling microscopy (STM). There is strong interest in the spatial control of bismuth atoms incorporated into silicon for quantum technological applications; however, there is currently no known precursor for the incorporation of bismuth that is compatible with this STM-based lithographic method. Here, we explore the precursor chemistry (adsorption, diffusion, and dissociation) of bismuth trichloride (BiCl3) on Si(001). We show atomic-resolution STM images of BiCl3 exposed Si(001) surfaces at low coverage and combine this with density functional theory calculations to produce a model of the surface processes and the observed features. Our results show that, at room temperature, BiCl3 completely dissociates to produce bismuth ad-atoms, ad-dimers, and surface-bound chlorine, and we explain how BiCl3 is a strong candidate for a bismuth precursor compound compatible with lithographic patterning at the sub-nanometer scale. [ABSTRACT FROM AUTHOR]

It has been observed in scanning tunneling microscopy (STM) that the adsorption of molecules on the (001) surface of a Group IV semiconductor can lead to an asymmetric ordering of the dimers immediately adjacent to the adsorbate. This so-called pinning may occur along the dimer row on only one, or both sides of the adsorbate. Here we present a straightforward methodology for predicting such pinning and illustrate this approach for several different adsorbate structures on the Si(001) surface. This approach extends earlier work by including the effects of coupling across the adsorbate as well as the nearest-neighbor interactions between the chemisorbed dimer and its adjacent dimers. The results are shown to be in excellent agreement with the room temperature experimental STM data. The examples also show how this approach can serve as a powerful tool for discriminating between alternative possible adsorbate structures on a dimerized semiconductor (001) surface, especially in cases of molecular adsorption where the STM measurements provide insufficient details of the underlying atomic structure. [ABSTRACT FROM AUTHOR]

A detailed understanding of the chemical reactions of organic molecules with semiconductor surfaces will greatly aid schemes for the incorporation of organic functionality into existing technologies. In this paper we report on the reaction of acetaldehyde (CH3CHO) with silicon (001) as revealed by a combination of temperature-dependent scanning tunneling microscopy (STM) experiments and density functional theory (DFT). We observe that low-coverage exposures at room temperature result almost exclusively in the formation of a single adsorbate species. Conversion of this structure into thermodynamically favored bridge-bonded structures is achieved through temperature anneals between 150–250 °C. We determine the chemical identity of each of the experimentally observed species by comparison with DFT total energy calculations and simulated STM images. Calculations of transition states are used to formulate a full reaction pathway explaining the formation of the observed species. Excellent agreement is found between our experimental measurements and theoretical calculations. The results also present a picture consistent with our previous work on acetone and reveal a general reaction pattern for molecules containing the acetyl COCH3 functional group, where the initial attachment to the surface is mediated by a carbonyl C=O group. This suggests that modification of the residue R will facilitate in binding other electronically active molecules to the surface in a controlled fashion. [ABSTRACT FROM AUTHOR]

We demonstrate the locating and imaging of single phosphorus atoms and phosphorus dopant nanostructures, buried beneath the Si(001) surface using scanning tunneling microscopy. The buried dopant nanostructures have been fabricated in a bottom-up approach using scanning tunneling microscope lithography on Si(001). We find that current imaging tunneling spectroscopy is suited to locate and image buried nanostructures at room temperature and with residual surface roughness present. From these studies, we can place an upper limit on the lateral diffusion during encapsulation with low-temperature Si molecular beam epitaxy. [ABSTRACT FROM AUTHOR]

The atomic scale structural and electronic characteristics of a silicon sample implanted with bismuth atoms are investigated using cross-sectional scanning tunneling microscopy (XSTM) and scanning tunneling spectroscopy (STS). We demonstrate that cleaving ion implanted samples provides an effective room temperature route for the preparation of atomically flat silicon surfaces with low defect density, preventing the diffusion of volatile impurities such as dopants. This enables atomic resolution STM studies of solitary implanted impurity atoms in their intrinsic silicon crystal sites and further allows us to map out a depth profile of the band-structure of the implanted area using STS. [ABSTRACT FROM AUTHOR]