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The emerging market of wearable devices for tracking and positioning requires the development of highly flexible magnetic sensors. Due to the stable magnetoresistance ratio and simple fabrication process, sensors based on the anisotropic magnetoresistance (AMR) effect have been proposed as promising candidates. However, the stability of AMR sensors under different bending situations has rarely been investigated. In this work, we proposed a flexible AMR magnetic sensor deposited on an ultra-thin Kapton substrate, which exhibits excellent anti-fatigue behavior at different bending curvatures ranging from 1/3 to 1/10 mm−1. Experimental results show that the sensitivity of our proposed flexible AMR sensor remains as high as 0.25 Oe−1 after being bent 500 times, showing promising potential for application in wearable electronic devices. [ABSTRACT FROM AUTHOR]

Magnetic tunnel junctions have been widely used in various applications, such as magnetic sensors and magnetic random-access memories. In the practical application of MTJs, they are usually used in series toward high sensitivity and high stability, especially for sensor applications. In this paper, serial MTJs devices on 8 in. wafers were fabricated. The temperature dependence of the tunnel magnetoresistance ratio, resistances in parallel and antiparallel configurations, and dynamic conductance were systematically investigated. The results of serial MTJs devices are consistent with a single MTJ device. This research suggests that serial MTJs can be directly used to investigate the magnetic tunneling properties of MTJ stacks. [ABSTRACT FROM AUTHOR]

This work presents a monolithically integrated temperature and humidity sensor based on microelectromechanical systems technology. The temperature sensor working on the "bi-metallic" effect has the advantages of wide temperature range, high sensitivity, and fast detection. The humidity sensor has a polyimide parallel plate capacitive structure with the microporous array on the upper electrode designed for high sensitivity and fast response. Numerical analysis and COMSOL simulation showed that the temperature detection sensitivity is 0.2 mV/°C in the range of 193–393 K and humidity sensitivity is 0.405 pF/% relative humidity (RH) with the response time of 34 s in the humidity range of 0%–100% RH. The integrated temperature and humidity sensor has the advantages of small dimension, wide detection range, high precision, and fast response. [ABSTRACT FROM AUTHOR]