1. Simple pulsed‐plasma‐beam gun for ultrahigh vacuum applications
- Author
-
Chikashi Yamada and Takahiro Kimura
- Subjects
congenital, hereditary, and neonatal diseases and abnormalities ,Hydrogen ,Deoxidization ,chemistry.chemical_element ,complex mixtures ,Physics::Plasma Physics ,parasitic diseases ,Wafer ,Plasma beam ,SIMPLE (dark matter experiment) ,Dense plasma focus ,business.industry ,Surfaces and Interfaces ,Physics::Classical Physics ,Condensed Matter Physics ,Computer Science::Other ,Surfaces, Coatings and Films ,chemistry ,Physics::Space Physics ,Electrode ,Physics::Accelerator Physics ,Optoelectronics ,Electric discharge ,Atomic physics ,business ,human activities - Abstract
A simple pulse‐operated plasma gun, which is a combination of a pulsed‐solenoid valve and an electrode to induce an electric discharge in gas at the outlet is described. The performance of the pulsed‐plasma‐beam gun was tested by carrying out hydrogen‐plasma deoxidization of a GaAs wafer.
- Published
- 1994
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