6 results on '"Oomori, Tatsuo"'
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2. Etching of (Ba,Sr)TiO3 film by chlorine plasma
3. Kinetics of etch products and reaction process in electron cyclotron resonance plasma etching of Si
4. Platinum etching in Ar/O2 mixed gas plasma with a thin SiO2 etching mask
5. Measurements of the Cl atom concentration in radio-frequency and microwave plasmas by two-photon laser-induced fluorescence: Relation to the etching of Si
6. Electrical and optical measurements of electron cyclotron resonance discharges in Cl2 and Ar
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