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There is a growing interest in knowing the sputter rates for a wide variety of oxides because of their increasing technological importance in many different applications. To support the needs of users of the Environmental Molecular Sciences Laboratory, a national scientific user facility, as well as our research programs, the authors made a series of measurements of the sputter rates from oxide films that have been grown by oxygen plasma-assisted molecular beam epitaxy, pulsed laser deposition, atomic layer deposition, electrochemical oxidation, or sputter deposition. The sputter rates for these oxide films were determined in comparison with those from thermally grown SiO2, a common reference material for sputter rate determination. The film thicknesses and densities for most of these oxide films were measured using x-ray reflectivity. These oxide films were mounted in an x-ray photoelectron or Auger electron spectrometer for sputter rate measurements using argon ion sputtering. Although the primary objec...

High-quality planar interfaces between ZnO and CdTe would be useful in optoelectronic applications. Although CdTe is zinc blende with cubic lattice constant a = 6.482 A while ZnO is hexagonal wurtzite with a = 3.253 A and c = 5.213 A, (001)-oriented cubic zinc blende ZnO films could be stabilized epitaxially on a CdTe (001) surface in an √2 × √2 R45° configuration with a lattice mismatch of

The authors report the magnetic and structural characteristics of epitaxial NiTiO3 films grown by pulsed laser deposition that are isostructural with acentric LiNbO3 (space group R3c). Optical second harmonic generation and magnetometry demonstrate lattice polarization at room temperature and weak ferromagnetism below 250 K, respectively. These results appear to be consistent with earlier predictions from first-principles calculations of the coexistence of ferroelectricity and weak ferromagnetism in a series of transition metal titanates crystallizing in the LiNbO3 structure. This acentric form of NiTiO3 is believed to be one of the rare examples of ferroelectrics exhibiting weak ferromagnetism generated by a Dzyaloshinskii–Moriya interaction.

ZnO/Sn:In2O3 (ITO) heterojunctions were fabricated by pulsed laser deposition. Ex situ x-ray photoelectron spectroscopy (XPS) was utilized to examine the band structure and band alignments of ITO films and ZnO/ITO heterojunctions. The apparent bandgap of ITO films was found to be sensitive to oxygen plasma exposure, with an observed bandgap ∼3 eV. Type II band alignments were found for oxygen plasma treated ZnO/ITO heterojunctions with either pure ZnO, Al:ZnO, or Ga:ZnO overlayers. The conduction band offsets were in the range of −0.5 to −0.7 eV, which is a larger magnitude than desired for efficient devices. A strong effect of processing treatment, either exposure to the oxygen plasma or gentle heating in vacuum, was found for the band alignments; under some conditions, the conduction band offset reversed sign. Tuning of the processing parameters in photovoltaic or electronic devices may lead to an improvement in the ZnO/ITO alignment.

Highly conductive thin films of ZnO doped with Ga were grown by pulsed laser deposition with 10 mTorr of H2 in the growth chamber. Compared with a more conventional method of producing conductive films of ZnO, i.e., growth in O2 followed by annealing in forming gas (5% H2 in Ar), the H2 method requires no postgrowth anneal and also produces higher carrier concentrations and lower resistivities with better depth uniformity. As an example, a 65-nm-thick sample had a room-temperature mobility of 32 cm2/V s, a concentration of 6.8×1020 cm−3, and a resistivity of 2.9×10−4 Ω cm. From a scattering model, the donor and acceptor concentrations were calculated as 8.9×1020 and 2.1×1020 cm−3, respectively, as compared to the Ga and H concentrations of 11×1020 and 1×1020 cm−3. The authors conclude that growth in H2 produces higher Ga-donor concentrations but that H-donors themselves do not play a significant role.

The heteroepitaxy of Co-doped anatase TiO2 on LaAlO3(001) has been refined with the goal of determining the relationship between structural quality and magnetic ordering. By significantly reducing the deposition rate and substrate temperature, well-ordered Co:TiO2 films with high crystalline quality were obtained by oxygen-plasma-assisted molecular beam epitaxy, as characterized by x-ray diffraction. These films exhibit uniform Co doping, with no evidence of Co segregation or secondary phases throughout the film depth or on the surface. Despite the improvement in crystalline quality and Co distribution, the films exhibit negligible ferromagnetism, with saturation moments of only ∼0.1μB∕Co. This loss of ferromagnetism is in stark contrast to faster-grown Co:TiO2 films, where higher growth rate and substrate temperature typically result in lower crystalline quality, a highly nonuniform Co distribution, and average saturation moments of ∼1.2μB∕Co. The presence of ferromagnetism in faster-grown Co:TiO2 does n...

We address the issue of accurate determination of the valence band maximum (VBM) for SrTiO3(001) single crystals and epitaxial films, as well as TiO2(001) anatase and SrO epitaxial films. These measurements are of critical importance in determining valence band offsets in heterojunctions of these oxides with Si. Three different methods are analyzed: (1) fitting a Gaussian broadened theoretical density of states to the x-ray photoelectron valence band spectrum; (2) finding the intersection of a regression line that spans the linear portion of the x-ray photoelectron valence band leading edge with the background between the valence band maximum and the Fermi level; and (3) determining the energy at which high-resolution ultraviolet photoemission intensity at the leading edge goes to zero. We find that method 1 yields physically unreasonable results when used in conjunction with density functional theory because the latter does not predict the detailed shape of the valence bands in these oxides with sufficie...