Author: "Ting, Yuk" / Publisher: american vacuum society - Searchworks@Jio Institute Digital Library Search Results

Searchworks

Select search scope, currently: Articles

Catalog

books, media & more in Jio Institute collections

Articles

journal articles & other e-resources

Your search keyword '"Ting, Yuk"' showing total 2 results

Start Over Author "Ting, Yuk" Publisher american vacuum society

2 results on '"Ting, Yuk"'

1. Plasma etch removal of poly(methyl methacrylate) in block copolymer lithography

Author: Ting, Yuk-Hong, primary, Park, Sang-Min, additional, Liu, Chi-Chun, additional, Liu, Xiaosong, additional, Himpsel, F. J., additional, Nealey, Paul F., additional, and Wendt, Amy E., additional
Published: 2008
Full Text: View/download PDF

2. Pattern transfer using poly(styrene-block-methyl methacrylate) copolymer films and reactive ion etching

Author: Liu, Chi-Chun, primary, Nealey, Paul F., additional, Ting, Yuk-Hong, additional, and Wendt, Amy E., additional
Published: 2007
Full Text: View/download PDF

Catalog

Books, media, physical & digital resources

See catalog results