1. Effect of Vanadium Thickness and Deposition Temperature on VO2 Synthesis using Atmospheric Pressure Thermal Oxidation
- Author
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Yogesh Singh Chauhan, Amit Verma, and Ashok P
- Subjects
Phase transition ,Materials science ,Analytical chemistry ,Vanadium ,chemistry.chemical_element ,FOS: Physical sciences ,02 engineering and technology ,Applied Physics (physics.app-ph) ,01 natural sciences ,symbols.namesake ,0103 physical sciences ,Materials Chemistry ,Deposition (phase transition) ,Thin film ,010302 applied physics ,Thermal oxidation ,Condensed Matter - Materials Science ,Atmospheric pressure ,Metals and Alloys ,Materials Science (cond-mat.mtrl-sci) ,Physics - Applied Physics ,Surfaces and Interfaces ,Sputter deposition ,021001 nanoscience & nanotechnology ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,chemistry ,symbols ,0210 nano-technology ,Raman spectroscopy - Abstract
Vanadium dioxide (VO2) is a phase transition material that undergoes a reversible insulator-metal phase transition at ~ 68 C. Atmospheric pressure thermal oxidation (APTO) of vanadium (V) is a simple VO2 synthesis method in which V thin film is oxidized in open air. For an optimum oxidation duration, VO2 films are obtained with good phase transition properties. We recently reported a modified APTO process using a step temperature profile for oxidation (Thin Solid Films 706, 138003 (2020)). We demonstrated an ultra-low thermal budget synthesis of VO2 thin films with good electrical and optical phase transition properties. For a 130 nm room-temperature RF sputtered V thin film, an optimum oxidation duration of ~ 30 s was obtained. In this work, we study how the starting V film thickness and deposition temperature affects the optimum oxidation duration. V thin films of varying thickness (15-212 nm) and 120 nm thick V films with varying deposition temperature (~27-450 C) are prepared using RF magnetron sputtering. These films are oxidized for different oxidation durations and characterized using Raman and four-probe measurements to find the optimum oxidation duration for each deposition condition. We find that the optimum oxidation duration increases with the increase in V film thickness and V deposition temperature. We model the effect of V film thickness and deposition temperature on the optimal oxidation time using a parabolic law which can be used to obtain the optimal oxidation times for intermediate V thicknesses/deposition temperatures., Comment: 17 pages, 6 figures
- Published
- 2021
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