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In this work, the use of Raman Stokes peak location and linewidth broadening methods were evaluated for thermometry applications of polysilicon microheaters subjected to evolving thermal stresses. Calibrations were performed using the temperature dependence of each spectral characteristic separately, and the uncertainty of each method quantified. It was determined that the Stokes linewidth was independent of stress variation allowing for temperature determination, irrespective of stress state. However, the linewidth method is subject to greater uncertainty than the Stokes shift determination. The uncertainties for each method are observed to decrease with decreasing temperature and increasing integration times. The techniques were applied to mechanically constrained electrically active polysilicon microheaters. Results revealed temperatures in excess of 500°C could be achieved in these devices. Using the peak location method resulted in an underprediction of temperature due to the development of a relative compressive thermal stress with increasing power dissipation.

In this paper, the results of an experimental study of the time-resolved structure of a thermal boundary layer in a pulsating channel flow are presented. The developing laminar regime is investigated. Two techniques were used for time-resolved temperature measurements: a nonintrusive, pure-rotational CARS method and cold-wire anemometry. Results are presented for differing degrees of flow reversal, and the data show that the primary impact of reversed flow is an increase in the instantaneous thermal boundary-layer thickness and a period of decreased instantaneous Nusselt number. For the developing laminar parameter space spanned by the experiments, time-averaged heat-transfer enhancements as high as a factor of two relative to steady flow are observed for nonreversing and partially reversed pulsating flows. It is concluded that reversal is not necessarily a requirement for enhancement.

Local mass transfer data for high-profile fins in the second row of in-line and staggered, circular-finned tubes are presented for Reynolds numbers from 5000 to 28,000 based on hydraulic diameter and velocity at the minimum flow area. The data, obtained using an optical adaptation of the naphthalene sublimation technique, show that local variations in heat transfer do not cause significant fin efficiency deviations from the analytical solution of Gardner (contrary to earlier reports). Average heat transfer and pressure drop data indicate that the thermal performance of the in-line arrangement is comparable to the staggered configuration.

Pump-probe transient thermoreflectance (TTR) techniques are powerful tools for measuring the thermophysical properties of thin films, such as thermal conductivity, Λ, or thermal boundary conductance, G. This paper examines the assumption of one-dimensional heating on, Λ and G, determination in nanostructures using a pump-probe transient thermoreflectance technique. The traditionally used one-dimensional and axially symmetric cylindrical conduction models for thermal transport are reviewed. To test the assumptions of the thermal models, experimental data from Al films on bulk substrates (Si and glass) are taken with the TTR technique. This analysis is extended to thin film multilayer structures. The results show that at 11 MHz modulation frequency, thermal transport is indeed one dimensional. Error among the various models arises due to pulse accumulation and not accounting for residual heating.

Micro-Raman thermometry has been demonstrated to be a feasible technique for obtaining surface temperatures with micron-scale spatial resolution for microelectronic and microelectromechanical systems (MEMSs). However, the intensity of the Raman signal emerging from the probed device is very low and imposes a requirement of prolonged data collection times in order to obtain reliable temperature information. This characteristic currently limits Raman thermometry to steady-state conditions and thereby prevents temperature measurements of transient and fast time-scale events. In this paper, we discuss the extension of the micro-Raman thermometry diagnostic technique to obtain transient temperature measurements on microelectromechanical devices with 100 μs temporal resolution. Through the use of a phase-locked technique we are able to obtain temperature measurements on electrically powered MEMS actuators powered with a periodic signal. Furthermore, we demonstrate a way of obtaining reliable temperature measurements on micron-scale devices that undergo mechanical movement during the device operation.