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Start Over Author "Gong, Haitao" Publisher china national chemical information center co., ltd.
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1. Production Status of Nitrogen Trifluoride.

Author

Gong Haitao and Lu Chao

Subjects
*NITROGEN trifluoride, *ELECTRONIC industries, *SEMICONDUCTOR industry, *NITROGEN compounds
Abstract

The article offers information on the production status of nitrogen triflouride (NF3), a recently developed specialty gas for electronic industry in China. It mentions that nitrogen triflouride is used as etchant for semiconductor materials like polysilicon, silicon nitride and tungsten silicide. Moreover, it notes that the country's nitrogen triflouride manufacturers do not have an influential brand in the industry and most of its product are exported first.

Published
2009

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