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Microelectronic Reference Materials (RMs) are a good way to achieve microelectronic traceability. To achieve full calibration of Automated Test Equipment (ATE), each test channel should be traced to calibration equipment of ATE based on RMs. This paper puts forward a design solution of calibration equipment of ATE based on RMs, which can realize the versatility and portability of calibration equipment, and realize automatic calibration progress.

A method of calibrating the integrated circuit ATE (Automatic Test Equipment) by synchronizing and measuring the signal on the DUT (Device Under Test) side while test is presented. This method connects the measuring instrument[1] to the pin of the DUT. Then the calibration software from the control computer receives the indication from the measuring instrument and the measurand[1] from the ATE. At last, the specifications of the ATE are calibrated via analyzing data from the measuring instrument and compare with the data from the ATE