1. Improved properties of Pt–HfO2 gate insulator–ZnO semiconductor thin film structure by annealing of ZnO layer
- Author
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Na, Kwang Duk, Kim, Jeong Hwan, Park, Tae Joo, Song, Jaewon, Hwang, Cheol Seong, and Choi, Jung-Hae
- Subjects
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ZINC oxide thin films , *SEMICONDUCTOR films , *GATE array circuits , *MOLECULAR structure , *CAPACITORS , *MICROFABRICATION , *SPUTTERING (Physics) , *ANNEALING of metals - Abstract
Abstract: Metal-insulator-semiconductor capacitors were fabricated with sputtered ZnO and atomic layer deposited HfO2 as the semiconductor and gate dielectric layers, respectively. From the capacitance–voltage measurements, it was confirmed that pre-deposition annealing of the sputtered ZnO layer at 300°C in air greatly decreased the interfacial trap density (∼2×1012 cm−2 eV−1). X-ray photoelectron spectroscopy showed a decrease in the OH bonds adsorbed on the ZnO surface after pre-deposition annealing, which improved the interface property. A very small capacitance equivalent thickness of 1.3nm was achieved, which decreased the operation voltage (<5V) of the device significantly. [Copyright &y& Elsevier]
- Published
- 2010
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